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Delivery: <= 5 days. True-PDF full-copy in English will be manually translated and delivered via email. GBZ42625-2023: Vacuum technology - Vacuum gauges - Characterization of quadrupole mass spectrometers for partial pressure measurement Status: Valid
Basic dataStandard ID: GB/Z 42625-2023 (GB/Z42625-2023)Description (Translated English): Vacuum technology - Vacuum gauges - Characterization of quadrupole mass spectrometers for partial pressure measurement Sector / Industry: National Standard Classification of Chinese Standard: J78 Classification of International Standard: 23.160 Word Count Estimation: 25,211 Date of Issue: 2023-05-23 Date of Implementation: 2023-05-23 Issuing agency(ies): State Administration for Market Regulation, China National Standardization Administration GBZ42625-2023: Vacuum technology - Vacuum gauges - Characterization of quadrupole mass spectrometers for partial pressure measurement---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order. GB /Z 42625-2023: Characteristics of quadrupole mass spectrometers for vacuum technology vacuum gauges for partial pressure measurement ICS 23:160 CCSJ78 National Standardization Guidance Technical Document of the People's Republic of China Vacuum Technology Vacuum Gauge Quadrupole Mass Spectrometer Characteristics for Partial Pressure Measurements Vacuumtechnology-Vacuumgauges-Characterizationof (ISO /T S20175:2018, IDT) Released on 2023-05-23 2023-05-23 Implementation State Administration for Market Regulation Released by the National Standardization Management Committee table of contentsPreface III Introduction IV 1 Scope 1 2 Normative references 1 3 Terms and Definitions 2 4 Symbols and abbreviations3 5 Required or recommended characteristic parameters under different application conditions 4 5:1 General requirements 4 5:2 General characteristics of QMS 4 5:3 Leak rate measurement and monitoring (helium leakage) 4 5:4 Leak rate monitoring (air leakage) 5 5:5 Leak rate monitoring (water leakage) 5 5:6 Residual gas analysis 5 5:7 Outgassing rate test 6 6 Characterization of vacuum systems for QMS 6 6:1 General requirements 6 6:2 Single gas vacuum system for characterization6 6:3 Mixed gas vacuum system for characterization8 7 Characterization and Calibration Procedures 9 7:1 General requirements 9 7:2 Mass resolution 9 7:3 Minimum detectable partial pressure (pMDPP) 10 7:4 Minimum detectable concentration (CMDC) 10 7:5 Dynamic range 11 7:6 Sensitivity to Interference Effect Ratio 11 7:7 Linear response range 12 7:8 Relative sensitivity coefficient 12 7:9 Graphical mode (cracking mode) 13 7:10 Outgassing rate of QMS 13 7:11 Pumping speed of QMS 13 8 Measurement uncertainty14 8:1 General requirements 14 8:2 Uncertainty in mass resolution14 8:3 Uncertainty in pMDPP14 8:4 Uncertainty of Minimum Detectable Concentration (CMDC) 14 8:5 Uncertainty in dynamic range 14 8:6 Uncertainty in sensitivity14 8:7 Uncertainty in the linear response range 15 8:8 Uncertainties in relative sensitivity coefficients 15 8:9 Uncertainties in figure coefficients 15 8:10 Uncertainties in deflation rate and pumping speed 15 8:11 Long-term stability of QMS characteristic parameters 15 9 Reporting Results 16 Appendix A (Informative) Under different flow conditions, the gas mixture in the measurement chamber is estimated from the known gas mixture in the storage container in front of the leakage element: Gas Composition 17 Reference 19forewordThis document is in accordance with the provisions of GB/T 1:1-2020 "Guidelines for Standardization Work Part 1: Structure and Drafting Rules for Standardization Documents" drafting: This document is equivalent to ISO /T S20175:2018 "Characteristics of quadrupole mass spectrometers for vacuum technology vacuum gauges for partial pressure measurement": The document type is adjusted from the ISO technical specification to the national standardization guidance document of our country: Please note that some contents of this document may refer to patents: The issuing agency of this document assumes no responsibility for identifying patents: This document is proposed by China Machinery Industry Federation: This document is under the jurisdiction of the National Vacuum Technology Standardization Technical Committee (SAC/TC18): This document was drafted by: Beijing Institute of Satellite Environmental Engineering, the Fifth Research Institute of China Aerospace Science and Technology Corporation Co:, Ltd: Institute, Shanghai Institute of Precision Metrology and Testing, Chongqing Yunhai Machinery Manufacturing Co:, Ltd:, Shenyang Huizhen Vacuum Technology Co:, Ltd:, Hunan Weige Magnetic Flow Co:, Ltd: Body Co:, Ltd:, Shenyang Vacuum Technology Research Institute Co:, Ltd: The main drafters of this document: Sun Lichen, Ren Guohua, Cui Yuhao, Zhou Xueqian, Cheng Yongjun, Sun Wenjun, Zhao Lan, Xiao Yinfeng, Weng Jun, Ni Bo, Tang Juncong, Wang Fan, Yan Jichun, Wang Gongfa, Wang Lina, Yan Rongxin, Li Weidan, Guo Chongwu, Han Yan, Liu Enjun, Dou Renchao, Zhang Zigang, Li Zheng, Chen Lian, Guan Baoguo, Song Qingzhu, Su Yuping, Wang Lingling:IntroductionQuadrupole mass spectrometers (QMS) are now used not only for leak monitoring and residual gas analysis in vacuum technology, but also as a An instrument used to provide quantitative analysis and industrial process control in processes such as physical, chemical vapor deposition, and corrosion: In EUV light In the engraving, semiconductor and medical industries, the outgassing rate is an important characteristic of vacuum components, and the quantitative test of these outgassing rates also uses a quadrupole mass spectrometer: The total pressure, the composition of the mixed gas, the setting of the QMS and the past use of the QMS will all affect the measurement signal, uncertainty and Apps have a noticeable impact: Therefore, it is unrealistic to calibrate the QMS in all possible application scenarios, but to use the QMS according to the QMS Calibrate under specific or standard conditions: This document is used to determine these calibration conditions: In order to ensure that users can compare different brands of QMS manufacturers and use the QMS correctly, it is also necessary to label these conditions: standardized: This document provides standardized calibration procedures for some important applications of QMS: These procedures are excerpts from an international Research results of the project EMRP (European Metrology Research Project) IND12: During the research and development process of this project, the research scope involved quadrupole mass spectrometry Manufacturers, distributors and users of the instrument: Vacuum Technology Vacuum Gauge Quadrupole Mass Spectrometer Characteristics for Partial Pressure Measurements1 ScopeThis document specifies the characteristics of a quadrupole mass spectrometer whose ion source is of the electron bombardment type and whose atoms have a small mass-to-charge ratio (m/z) at 300: This document does not apply to quadrupole mass spectrometers equipped with other types of ion sources, such as chemical ionization, photoionization, or field Ionization-type ion sources are also not suitable for analysis and measurement of quadrupole mass spectrometers with large mass-to-charge ratios (m/z), which are mainly used to detect organic materials: According to published literature, the metrological characteristics of a quadrupole mass spectrometer depend on the instrument settings, total pressure and gas mixture composition, so Therefore, it is impractical to calibrate a quadrupole mass spectrometer for all application conditions: The characterization methods specified in this document include vacuum system Continuous leak monitoring, leak rate measurement with tracer gas, residual gas analysis and material outgassing rate testing: Users can choose to suit their needs Other application situations can also refer to the characteristic method of this document: It is known that the stability of some parameters of quadrupole mass spectrometer is poor, especially the sensitivity: Therefore, the calibrated parameters, when higher accuracy is required, still Repeated recalibration is required: Under actual working conditions, it can only be calibrated on site: Therefore, this document not only describes the capabilities of a calibration laboratory or national metrology institute: How to calibrate a quadrupole mass spectrometer with direct traceability to the International System of Units (SI), and describes how the calibrated can be inspected and maintained in the field parameter: According to its physical principle, quadrupole mass spectrometer needs high vacuum environment: By reducing the inlet size or by using a special ion source in combination with a split flow pump Combined, the operating range of a quadrupole mass spectrometer can be extended to higher pressures, up to atmospheric pressure: However, this document does not apply to Gas technology quadrupole mass spectrometer: Therefore, the pressure range at the inlet of the quadrupole mass spectrometer in this document does not exceed 1Pa: This document does not specify how the manufacturer or distributor should adjust the initial parameters of the quadrupole mass spectrometer, these initial parameters are mainly used to provide An exact m/z, constant mass resolving power or constant transmission probability, these are the fundamental parameters of the device: Conversely, this document has by default A parameter readjustment program provided by the manufacturer, the user can readjust the parameters in the field: This procedure is designed to ensure the characteristics of the quadrupole mass spectrometer The parameters are all in the optimal state: This document is intended to allow users to obtain the best metrological results from their quadrupole mass spectrometer: The survey found that, in most cases, the ability to scan This effect is obtained in "mode": Histograms may also exhibit adequate metrological characteristics, depending on the software used for Evaluate data acquired by a quadrupole mass spectrometer: However, on the mass scale, a shift in the peak position causes a change in the ion current, which can be seen in the mass spectrum introduce additional uncertainty: Therefore, scan mode is superior to most of the measurement procedures in this document: It is not the purpose of this document to determine all parameters for each quadrupole mass spectrometer: However, to specify or measure the parameter values in this document (For example, for inspection and testing), it is necessary to follow the procedures specified in this document: This document assumes that the user is familiar with the operation of a quadrupole mass spectrometer, as well as high vacuum and ultra-high vacuum techniques:2 Normative referencesThe contents of the following documents constitute the essential clauses of this document through normative references in this document: Among them, dated references For documents, only the version corresponding to the date is applicable to this document; for undated reference documents, the latest version (including all amendments) is applicable to this document: GB/T 34873-2017 Calibration for direct comparison of vacuum gauges with standard vacuum gauges (ISO 3567:2011, IDT) ......Tips & Frequently Asked Questions:Question 1: How long will the true-PDF of GBZ42625-2023_English be delivered?Answer: Upon your order, we will start to translate GBZ42625-2023_English as soon as possible, and keep you informed of the progress. 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