GBZ42624-2023 English PDF

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GBZ42624-2023: Vacuum technology - Vacuum gauges - Procedures to measure and report outgassing rates
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Basic data

Standard ID: GB/Z 42624-2023 (GB/Z42624-2023)
Description (Translated English): Vacuum technology - Vacuum gauges - Procedures to measure and report outgassing rates
Sector / Industry: National Standard
Classification of Chinese Standard: J78
Classification of International Standard: 23.160
Word Count Estimation: 35,386
Date of Issue: 2023-05-23
Date of Implementation: 2023-05-23
Issuing agency(ies): State Administration for Market Regulation, China National Standardization Administration

GBZ42624-2023: Vacuum technology - Vacuum gauges - Procedures to measure and report outgassing rates

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
GB /Z 42624-2023: Testing and reporting procedures for the outgassing rate of vacuum technology vacuum gauges ICS 23:160 CCSJ78 National Standardization Guidance Technical Document of the People's Republic of China Vacuum Technology Vacuum Gauge Outgassing Rate Testing and Reporting Procedures Vacuumtechnology-Vacuumgauges- (ISO /T S20177:2018, IDT) Released on 2023-05-23 2023-05-23 implementation State Administration for Market Regulation Released by the National Standardization Management Committee

table of contents

Preface I Introduction II 1 Scope 1 2 Normative references 1 3 Terms and Definitions 2 4 Symbols and abbreviations3 5 Test System 3 5:1 General requirements 3 5:2 Test system using flow method 5 5:3 Cumulative systems 10 6 Test method 11 6:1 Overview 11 6:2 Recommended sample preparation methods12 6:3 Test process and time 12 6:4 Test procedure 13 7 Uncertainty of measurement 17 7:1 Overview 17 7:2 Continuous expansion systems used as flow comparison devices (5:2:2) 18 7:3 Flow systems with computable conductance elements (5:2:3) 18 7:4 Flow systems with measurable effective pumping speed (5:2:4) 18 7:5 Flow systems with adjustable conductance elements (5:2:5) 19 7:6 Basic accumulation system (5:3:2) 19 7:7 Accumulation system with gas analysis system (5:3:3) 19 8 Test report 22 Appendix A (Informative) Schematic Diagrams of Various Test Systems 23 Appendix B (informative) Characteristics and applicability of different test systems 28 Appendix C (informative) Traceability of different measurement systems to SI 29 Reference 30

foreword

This document is in accordance with the provisions of GB/T 1:1-2020 "Guidelines for Standardization Work Part 1: Structure and Drafting Rules for Standardization Documents" drafting: This document is equivalent to ISO /T S20177:2018 "Testing and reporting procedure for vacuum technology vacuum gauge outgassing rate": Please note that some contents of this document may refer to patents: The issuing agency of this document assumes no responsibility for identifying patents: This document is proposed by China Machinery Industry Federation: This document is under the jurisdiction of the National Vacuum Technology Standardization Technical Committee (SAC/TC18): This document was drafted by: Beijing Institute of Satellite Environmental Engineering, the Fifth Research Institute of China Aerospace Science and Technology Corporation Co:, Ltd: Institute, Shanghai Institute of Precision Metrology and Testing, Chongqing Yunhai Machinery Manufacturing Co:, Ltd:, Shenyang Huizhen Vacuum Technology Co:, Ltd:, Hunan Weige Magnetic Flow Co:, Ltd: Body Co:, Ltd:, Hefei University of Technology, Shenyang Vacuum Technology Research Institute Co:, Ltd: The main drafters of this document: Sun Lichen, Zhao Yueshuai, Qi Lei, Yuan Cuiping, Cheng Yongjun, Zhao Lan, Sun Wenjun, Xiao Yinfeng, Weng Jun, Ni Bo, Tang Juncong, He Wanfei, Yan Jichun, Yan Wenjing, Bi Hailin, Sun Lizhi, Pan Ying, Shi Jijun, Meng Donghui, Liu Xingyue, Zhong Liang, Qi Jiadong, Guo Qi, Wang Li, Yu Xinfa, Dong Meng, Zhang Ruifang, Song Qingzhu, Qiao Zhonglu, Wang Lingling:

Introduction

Bleeding of the vacuum chamber wall and its internal components limits the ultimate pressure of the vacuum system and its cleanliness: For research equipment (such as accelerated equipment), equipment that needs to ensure surface cleanliness (such as molecular beam epitaxy equipment), or equipment that needs to maintain high vacuum under long-term pump-free conditions (such as equipment containing hair For equipment such as injectors or X-ray tubes, medical instruments, surface analysis instruments or thermal insulation panels, etc:), the achievable ultimate pressure is an important technical indicators: In many industrial applications, such as coating, extreme ultraviolet lithography, catalysis, drying processes in the pharmaceutical or food industry, and accelerated For reactors, fusion reactors, etc:, vacuum cleanliness (that is, complete absence of a particular gas or vapor, or their partial pressure is sufficiently low) is also an important required technical indicators: Therefore, in vacuum technology, the test of outgassing rate is an important quality assurance measure: This document specifies the The test procedure of outgassing rate makes the measurement results of outgassing rate traceable: Appendix A lists schematics of various test systems: Vacuum Technology Vacuum Gauge Outgassing Rate Testing and Reporting Procedures

1 Scope

This document specifies the outgassing rate test procedure for vacuum chambers as a whole and its components: The outgassing rates applicable in this document are determined by Produced by high vacuum equipment, less than 1×10-5Pa·m3·s-1 (1×10-2Pa·L·s-1) at 23°C, various gases generated by degassing Or the molecular weight of the steam is less than 300u: The upper limit of the total outgassing rate, 1×10-5 Pa·m3·s-1, has nothing to do with the size, total surface area, material or state of the outgassing material: If marked It is said that the outgassing rate (outgassing rate per unit area) has been determined, and the area shall be the nominal geometric surface area instead of the specific surface area including surface roughness: When it is difficult to determine the nominal geometric surface area of the sample (such as powder, porous material, very rough surface or complex equipment, etc:), the single Bit mass outgassing rate (eg outgassing rate per gram): In many practical applications, it is only necessary to determine the total outgassing rate: If a test instrument whose sensitivity depends on the type of gas is used, the total outgassing Rates are given as equivalent nitrogen outgassing rates: If the total outgassing rate is high, there are species that need to identify interfering gases in order to improve the sample material: class and determine its outgassing rate: This document covers both cases: Some molecules produced by outgassing were able to be adsorbed by the surface and the residence time was much longer than the total test time: These molecules are not on the direct path , it cannot be detected by the test equipment: This can be considered a surface effect, and studies using surface analysis are far more effective than the conventional outgassing considered here: Rate measurement is more effective: At the same time, molecules released from surfaces by ultraviolet light or X-ray irradiation are also not applicable to this document: This document is formulated to standardize the test method of outgassing rate, so that the test values obtained in different laboratories and using different methods comparable: For this purpose, for any of the methods specified in this document, the most important parameters in each method can be traced to International Base Units (SI): The mass loss method is a gas-independent test method for outgassing rate, which is mainly used for testing the outgassing rate of spacecraft and satellite materials: Within the acceptable test time range, the outgassing rate ( >1×10-5Pa·m3·s-1) that can be tested by the mass loss method is significantly higher than that of the conventional high-fidelity method: Outgassing rates for empty and ultra-high vacuum components: Moreover, since the balance is not suitable for use in a vacuum environment, considering the weight of the vacuum chamber, it is impossible to bit test samples: Therefore, this document does not consider the mass loss method: This document is suitable for those who are familiar with high vacuum and ultra-high vacuum technology and corresponding test instruments (for example, ionization vacuum gauge and quadrupole mass spectrometer etc:) personnel used:

2 Normative references

The contents of the following documents constitute the essential provisions of this document through normative references in the text: Among them, dated references For documents, only the version corresponding to the date is applicable to this document; for undated reference documents, the latest version (including all amendments) is applicable to this document: ISO 3529 (all parts) Vacuum technology terminology (Vacuumtechnology-Vocabulary) Note: GB/T 3163-2007 Vacuum Technical Terms (ISO 3529:1981, MOD) ISO 14291 Definitions and specifications for vacuum gauge quadrupole mass spectrometers Note: GB/T 40333-2021 Definition and specification of vacuum gauge quadrupole mass spectrometer (ISO 14291:2012, IDT) ISO /IEC 17025 General requirements for the competence of testing and calibration laboratories Note: GB/T 27025-2019 General requirements for the competence of testing and calibration laboratories (ISO /IEC 17025:2017, IDT) ISO /T S20175 Vacuum technology Vacuum gauges - Characteristics of quadrupole mass spectrometers for partial pressure measurements ......

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