GB/T 6624-2009 English PDFUS$149.00 · In stock
Delivery: <= 2 days. True-PDF full-copy in English will be manually translated and delivered via email. GB/T 6624-2009: Standard method for measuring the surface quality of polished silicon slices by visual inspection Status: Valid GB/T 6624: Historical versions
Basic dataStandard ID: GB/T 6624-2009 (GB/T6624-2009)Description (Translated English): Standard method for measuring the surface quality of polished silicon slices by visual inspection Sector / Industry: National Standard (Recommended) Classification of Chinese Standard: H80 Classification of International Standard: 29.045 Word Count Estimation: 5,551 Date of Issue: 2009-10-30 Date of Implementation: 2010-06-01 Older Standard (superseded by this standard): GB/T 6624-1995 Quoted Standard: GB/T 14264 Regulation (derived from): National Standard Approval Announcement 2009 No.12 (Total No.152) Issuing agency(ies): General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China Summary: This standard provides that under certain lighting conditions, using a single crystal polished visual inspection method (hereinafter referred to as polished) surface quality. This standard applies to silicon polished surface quality inspection. Wafer surface quality visual inspection method can refer to. GB/T 6624-2009: Standard method for measuring the surface quality of polished silicon slices by visual inspection---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order. Standard method for measuring the surface quality of polished silicon slices by visual inspection ICS 29.045 H80 National Standards of People's Republic of China Replacing GB/T 6624-1995 The surface quality of polished silicon slices by visual inspection Posted 2009-10-30 2010-06-01 implementation Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China Standardization Administration of China released ForewordThis standard replaces GB/T 6624-1995 "surface quality of polished silicon slices by visual inspection." The standards are compared with the original standard was mainly the following changes. --- Modify the aggregation of high intensity light source illumination requirements by not less than 16000lx to not less than 230000lx; --- Increased cleanroom level requirements; --- Expanding the light meter measuring range 0lx ~ 330000lx; --- Increasing the length measurement tool; --- Detect changes in distance between the light source and the wafer condition between the requirements. This standard by the National Standardization Technical Committee of semiconductor equipment and materials proposed. This standard by the National Standardization Technical Committee materials and equipment at the Technical Committee of semiconductor material. Drafting of this standard. Shanghai Material Co., Ltd. co-crystal silicon. The main drafters of this standard. Xu Xinhua, Wang Zhen. This standard superseded standard previously issued as follows. --- GB/T 6624-1986, GB/T 6624-1995. The surface quality of polished silicon slices by visual inspection1 ScopeThis standard specifies under certain lighting conditions, using a single crystal polished visual inspection method (hereinafter referred to as polished) surface quality. This standard applies to silicon polished surface quality inspection. Wafer surface quality visual inspection can be carried out with reference to the present method.2 Normative referencesThe following documents contain provisions which, through reference in this standard and become the standard terms. For dated references, subsequent Amendments (not including errata content) or revisions do not apply to this standard, however, encourage the parties to the agreement are based on research Whether the latest versions of these documents. For undated reference documents, the latest versions apply to this standard. GB/T 14264 semiconductor material terms3 TermsThe term of this standard should relate to comply with GB/T 14264 of.4 principle of the methodPolished silicon surface quality defects in certain lighting conditions can produce the diffuse reflected light, and can be visually observed, thus can visually check Test its surface defects.5 equipment and appliances5.1 high-intensity light source aggregation. illumination of not less than 230000lx. 5.2 large area diffuse light source. fluorescent light intensity can be adjusted or creamy white light, the intensity of the light detecting surface of 430lx ~ 650lx. 5.3 clean room. clean room level should be consistent with the level of wafer surface particle detector is not less than 100. 5.4 purification station. size to accommodate testing equipment, purification level than 100 away from the cleaning station at the front edge 230mm background illumination 50lx ~ 650lx. 5.5 vacuum suction pen. removable suction tip clean, leaving no trace after contact with polished, without introducing any defects. 5.6 Light Meter. should be measured 0lx ~ 330000lx. 5.7 metric ruler. accuracy no less than 1mm.6 SampleIn accordance with the sampling plan or sampling plans agreed extracted from the polished sample after washing.7 test7.1 test conditions 7.1.1 In the clean room, vacuum suction pen sucked back of the polished wafers, the polishing side up, facing the light source. Light, polished and testing Person Is set as shown in FIG. Polished distance from the light source is 10cm ~ 20cm. α angle recommends 45 ° ± 10 °, β angle is recommended 90 ° ± 10 °. ......Tips & Frequently Asked Questions:Question 1: How long will the true-PDF of GB/T 6624-2009_English be delivered?Answer: Upon your order, we will start to translate GB/T 6624-2009_English as soon as possible, and keep you informed of the progress. The lead time is typically 1 ~ 2 working days. The lengthier the document the longer the lead time.Question 2: Can I share the purchased PDF of GB/T 6624-2009_English with my colleagues?Answer: Yes. The purchased PDF of GB/T 6624-2009_English will be deemed to be sold to your employer/organization who actually pays for it, including your colleagues and your employer's intranet.Question 3: Does the price include tax/VAT?Answer: Yes. 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