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GB/T 34971-2017 English PDF

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US$399.00 · In stock
Delivery: <= 4 days. True-PDF full-copy in English will be manually translated and delivered via email.
GB/T 34971-2017: Guide for gaseous effluent handling in semiconductor industry
Status: Valid

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
GB/T 34971-2017	399	Add to Cart	4 days	Guide for gaseous effluent handling in semiconductor industry	Valid

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Basic data

Standard ID: GB/T 34971-2017 (GB/T34971-2017)
Description (Translated English): Guide for gaseous effluent handling in semiconductor industry
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: G86
Classification of International Standard: 71.040.40
Word Count Estimation: 20,282
Date of Issue: 2017-11-01
Date of Implementation: 2018-02-01
Regulation (derived from): National Standard Announcement 2017 No. 29
Issuing agency(ies): General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China

GB/T 34971-2017: Guide for gaseous effluent handling in semiconductor industry

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Guide for gaseous effluent handling in semiconductor industry ICS 71.040.40 G86 National Standards of People's Republic of China Guide for the treatment of gases used in the manufacture of semiconductors Posted.2017-11-01 2018-02-01 implementation General Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China China National Standardization Administration released

Foreword

This standard was drafted in accordance with the rules given in GB/T 1.1-2009. This standard is proposed and managed by the National Semiconductor Equipment and Materials Standardization Technical Committee (SAC/TC203). This standard was drafted. Hao Chemical Research and Design Institute Co., Ltd., Southwest Chemical Research and Design Institute Co., Ltd., high-Mai instrument Division, Guangdong Huate Gas Co., Ltd., Dongguan City, Chen Electronics Technology Co., Ltd., Shanghai Hua love chromatography Technology Co., Ltd., Shanghai City Measurement and Testing Technology Research Institute. The main drafters of this standard. Sun Fu Nan, Niu Yan East, Liao Heng Yi, Du Han Sheng, Wang Hong, Fang Hua, Chen Ying, Zhou Peng cloud. Guide for the treatment of gases used in the manufacture of semiconductors

1 Scope

This standard specifies the principle and technology of gas emission system for semiconductor manufacturing. This standard applies to the manufacture of semiconductor gas processing.

2 Terms and definitions

The following terms and definitions apply to this document. 2.1 Efficiency The ratio (fraction or ratio) of chemical species removed to their volume delivered. 2.2 Pipe end emission reduction end-of-pipeabatement Abatement technologies that can be used at the emission point of an exhaust gas treatment system. 2.3 Point-of-use abatement is used Abatement technology that can be used at the point of discharge of gas emission devices from semiconductor process equipment. 2.4 Removal capacitycapacity A substance can be removed by the amount.

3 Abbreviations

The following abbreviations apply to this document. CVD. Chemical Vapor Deposition EPI. Epitaxial Deposition LEL. Lower Explosive Limits LPCVD. Low Pressure Chemical Vapor Deposition OEL. Occupational exposure limits (Ocupational Exposure Limit) PECVD plasma enhanced chemical vapor deposition (PlasmaEnhancedChemicalVaporDeposition) PFC. Perfluorocompounds POU. PointOfUse RTP. Rapid Heat Treatment (RapidThermalProcess) VOC. Volatile Organic Compounds

4 General rules

4.1 Many processes may discharge the gas mixture may also be produced in the exhaust pipe of harmful substances. ......

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Tips & Frequently Asked Questions:

Question 1: How long will the true-PDF of GB/T 34971-2017_English be delivered?

Answer: Upon your order, we will start to translate GB/T 34971-2017_English as soon as possible, and keep you informed of the progress. The lead time is typically 2 ~ 4 working days. The lengthier the document the longer the lead time.

Question 2: Can I share the purchased PDF of GB/T 34971-2017_English with my colleagues?

Answer: Yes. The purchased PDF of GB/T 34971-2017_English will be deemed to be sold to your employer/organization who actually pays for it, including your colleagues and your employer's intranet.

Question 3: Does the price include tax/VAT?

Answer: Yes. Our tax invoice, downloaded/delivered in 9 seconds, includes all tax/VAT and complies with 100+ countries' tax regulations (tax exempted in 100+ countries) -- See Avoidance of Double Taxation Agreements (DTAs): List of DTAs signed between Singapore and 100+ countries

Question 4: Do you accept my currency other than USD?

Answer: Yes. If you need your currency to be printed on the invoice, please write an email to Sales@ChineseStandard.net. In 2 working-hours, we will create a special link for you to pay in any currencies. Otherwise, follow the normal steps: Add to Cart -- Checkout -- Select your currency to pay.