GB/T 32218-2015 English PDF

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GB/T 32218-2015: Vacuum technology -- Test methods for leak rates of vacuum system
Status: Valid

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Basic data

Standard ID: GB/T 32218-2015 (GB/T32218-2015)
Description (Translated English): Vacuum technology -- Test methods for leak rates of vacuum system
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: J78
Classification of International Standard: 23.160
Word Count Estimation: 16,195
Date of Issue: 2015-12-10
Date of Implementation: 2017-01-01
Quoted Standard: GB/T 3163; GB/T 3864-2008; GB/T 4844-2011; GB/T 18193
Regulation (derived from): National Standard Announcement 2015 No.38
Issuing agency(ies): General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China
Summary: This standard provides for the vacuum system leak rate test test principle using helium mass spectrometry and boost method, apparatus and equipment, test conditions, test procedures, the leak rate test interrupt processing, test records and test reports. This standard applies to the vacuum system (hereinafter referred to as the subject member) leak rate tests.

GB/T 32218-2015: Vacuum technology -- Test methods for leak rates of vacuum system

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Vacuum technology - Test methods for leak rates of vacuum system ICS 23.160 J78 National Standards of People's Republic of China Vacuum technology Vacuum Leak Rate Test Method Issued on. 2015-12-10 2017-01-01 implementation Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China Standardization Administration of China released

Table of Contents

Introduction Ⅲ 1 Scope 1 2 Normative references 1 3 Terms and definitions 4 Test Principle 1 4.1 helium mass spectrometry vacuum system leak rate test principle 1 4.2 Static boost method of vacuum system leak rate testing principle 2 Instruments and equipment 2 5 5.1 leak detector and leak detection system 2 2 5.2 Standard leak 5.3 gauge 2 5.4 helium cover 2 5.5 Cumulative valve 2 5.6 Test valve 2 6 Test Conditions 2 6.1 test site environmental requirements 2 6.2 Helium 3 6.3 nitrogen 3 7 Test Procedure 3 7.1 Test Preparation before 3 7.2 helium mass spectrometry vacuum system leak rate test 3 7.3 Static boost method of vacuum leak rate test system 10 8 Leak Rate Test interrupt handling 11 8.1 Helium leak rate test interrupt handling 11 8.2 Static boost leak rate test method interrupt handling 11 9 test recording and reporting 11 11 9.1 Test record 9.2 Test Report 12 References 13

Foreword

This standard was drafted in accordance with GB/T 1.1-2009 given rules. The standard proposed by China Machinery Industry Federation. The vacuum technology standard by the National Standardization Technical Committee (SAC/TC18) centralized. This standard is drafted by. China Academy of Space Technology, Lanzhou Institute of Physics of Space Technology. Participated in the drafting of this standard. Beijing Institute of Spacecraft Environment Engineering, Hunan Ludwig MHD Co., Ltd., Anhui instrument technology stocks Parts Limited, Ningbo ULVAC Vacuum Technology Co., Ltd. Chengdu South-ray machines, Taizhou Global Vacuum Equipment Manufacturing Co., Ltd. Shanghai Huifeng Petrochemical Co., Ltd., Shenyang Institute of Vacuum Technology. The main drafters of this standard. Li Detian, Xiaoxiang positive, Chen Guangqi, Wang Rongzong, CHEN Lian, Sun Lichen, Yan Rongxin, made following spring, Ms. Huang, Liu Lei, Wang Guodong, He Xiaobo, Fanlin Dong, Zhao meter spring, Zhao Weisheng, Hui Zemin, Wang Lingling. Vacuum technology Vacuum Leak Rate Test Method

1 Scope

This standard provides for the vacuum system leak rate test test principle using helium mass spectrometry and boost method, apparatus and equipment, test strips Member, test procedures, the leak rate test interrupt processing, test records and test reports. This standard applies to the vacuum system (hereinafter referred to as the subject member) leak rate tests.

2 Normative references

The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein Member. For undated references, the latest edition (including any amendments) applies to this document. GB/T 3163 vacuum technology terms GB/T 3864-2008 industrial nitrogen GB/T 4844-2011 pure helium, high purity helium and ultra-pure helium GB/T 18193 Vacuum technology - Mass Spectrometer Leak Detector Calibration

3 Terms and Definitions

GB/T 3163 defined by the following terms and definitions apply to this document. 3.1 Effective minimum leak rate effectiveminimumdetectableleakrate Minimum leak was seized after connecting member and the leak detection system, leak detector and leak detection system under specific operating conditions, can leak detection Leak rate. Note. Units Pa cubic meters per second (Pa · m3/s). 3.2 Cumulative leak accumulationleaktest After the pieces were seized evacuated and shut down the cumulative valve exhaust system isolation. When the subject member externally applied certain concentration of helium, if the subject member The leakage hole, within the prescribed cumulative time from being leaked leak detection member helium will accumulate in the subject member that is Helium member within minutes Pressure increases with the accumulation time. Open the valve when the cumulative cumulative time expires, use helium leak detectors detect the partial pressure of helium within the subject member, from Calculated method is one kind of leak detection member total leak rate. NOTE. It is a method used to detect small leaks of helium mass spectrometer leak detection methods. 3.3 Helium concentration heliumconcentration In the mixed gas, helium gas mixture and pressure points ratio of the total pressure.

4 Test principle

4.1 helium mass spectrometry vacuum system leak rate testing principle Gun or helium leak helium hood is shown through the drain hole into the subject member, and introduced into the leak detector, leak detector causes a change in the output instruction, ......

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