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GB/T 31470-2015 English PDF

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GB/T 31470-2015: Standard practice for determination of the specimen area contributing to the detected signal in Auger electron spectrometers and some X-ray photoelectron spectrometers
Status: Valid
Standard IDUSDBUY PDFLead-DaysStandard Title (Description)Status
GB/T 31470-2015239 Add to Cart 3 days Standard practice for determination of the specimen area contributing to the detected signal in Auger electron spectrometers and some X-ray photoelectron spectrometers Valid

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Basic data

Standard ID: GB/T 31470-2015 (GB/T31470-2015)
Description (Translated English): Standard practice for determination of the specimen area contributing to the detected signal in Auger electron spectrometers and some X-ray photoelectron spectrometers
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: N26
Classification of International Standard: 17.220.20
Word Count Estimation: 11,148
Date of Issue: 2015-05-15
Date of Implementation: 2016-01-01
Quoted Standard: GB/T 22461-2008; SJ/T 10458-1993
Regulation (derived from): National Standard Announcement 2015 No. 15
Issuing agency(ies): General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China
Summary: This Standard specifies the method for determining the X-ray photoelectron spectroscopy, Auger electron spectroscopy detection signals and some types of the corresponding sample area. This Standard applies to Auger electron spectroscopy and X-ray photoelectron spectroscopy with the following conditions: an incident X-ray beam excited sample area is larger than the analyzer can be detected in the sample area; photoelectrons from the sample to the analyzer through free entry process space; fitted with an auxiliary electron gun can produce a bunch of variable energy of the electron beam onto the sample.

GB/T 31470-2015: Standard practice for determination of the specimen area contributing to the detected signal in Auger electron spectrometers and some X-ray photoelectron spectrometers


---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Standard practice for determination of the specimen area contributing to the detected signal in Auger electron spectrometers and some X-ray photoelectron spectrometers ICS 17.220.20 N26 National Standards of People's Republic of China Auger electron spectroscopy and X-ray photoelectron spectroscopy test General determined the detection signal corresponding to the sample area Issued on. 2015-05-15 2016-01-01 implementation Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China Standardization Administration of China released

Foreword

This standard was drafted in accordance with GB/T 1.1-2009 given rules. The standard equipment by the National Standardization Technical Committee and the semiconductor material (SAC/TC203) and focal points. This standard was drafted. the information industry materials for Quality Supervision and Inspection Center, China Electronics Standardization Institute, Suzhou Jing Rui technology Optical Co., Ltd., Tianjin Central-leading materials technology Limited. The main drafters of this standard. Li Yuchen, Hexiu Kun, Liu Yun, Liu Bing, Li Xiang.

Introduction

Analysis of Auger electron spectroscopy and X-ray photoelectron spectroscopy is widely used in the material surface. This standard has summed up the focus Electron beam or focused X-ray beam function instrument can scan area is greater than when the sample is detected by the analyzer region, so that by choosing the electric Operating conditions photon energy analyzer to determine the method to the observation area of \u200b\u200bthe sample. Samples were observed in the area depends on the electron energy points Before analyzing whether decelerated by energy analyzer or reduction ratio, if the electrons are decelerated before the energy analysis, the selected aperture or slit Path and electron energy value can be measured. Region is observed to depend on the electron energy analyzer operating conditions may also be suitable with the selection of the sample When adjustments related. This information can be given standard imaging properties of the electron energy analyzer under specific operating conditions. This information on the performance of the analyzer And carried out the manufacturer's instructions as described in comparison with a certain help. Auger electron spectroscopy and X-ray photoelectron spectroscopy test General determined the detection signal corresponding to the sample area

1 Scope

This standard specifies the method for determining X-ray photoelectron spectroscopy, Auger electron spectroscopy detection signals and some types of the corresponding sample area. This standard applies to Auger electron spectroscopy and the following conditions X-ray photoelectron spectroscopy. an incident X-ray beam excited sample area Analyzer greater area of \u200b\u200bthe sample can be detected; optoelectronic through free space from the sample inlet to the analyzer process; auxiliary electronic assembly Gun can produce a bunch of variable energy electron beam onto the sample.

2 Normative references

The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein Member. For undated references, the latest edition (including any amendments) applies to this document. GB/T 22461-2008 Surface chemical analysis - Vocabulary (ISO 18115.2001, IDT) SJ/T 10458-1993 Auger electron spectroscopy and X-ray photoelectron spectroscopy technique surgery Standard Guide for sample preparation

3 Terms and Definitions

Terms and definitions GB/T 22461-2008 defined apply to this document.

4 Abbreviations

The following abbreviations apply to this document. AES. Auger electron spectroscopy (Augerelectronspectrometer) XPS. X-ray photoelectron spectroscopy (X-rayphotoelectronspectrometer) FWHM. half-height width (fulwidthathalfmaximum)

5 Instruments

5.1 Sample Recommended test sample is a metal foil type conductor, a lateral dimension greater than the size of the electron energy analyzer detection region. Grain sample It should be less than the expected size of the spatial resolution of the analyzer, or the diameter of the incident electron beam, in order to avoid channel effects caused by the diffraction effect or illusion. The sample surface should be smooth, no scratches and similar defects can be observed with the naked eye. Ion sputtering or other methods used to remove Contamination of the sample surface (e.g., an oxide, the adsorbed hydrocarbons, etc.), surface cleanliness can be measured by XPS or AES verified. 5.2 electron gun Equipment required to provide an electron gun incident on the sample surface spectrometer, resorted to a signal emitted electron beam energy 100eV ~ 3keV
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