GB/T 24468-2009 English PDFUS$759.00 · In stock
Delivery: <= 6 days. True-PDF full-copy in English will be manually translated and delivered via email. GB/T 24468-2009: Specification for definition and measurement of semiconductor equipment reliability, availability and maintainability (RAM) Status: Valid
Basic dataStandard ID: GB/T 24468-2009 (GB/T24468-2009)Description (Translated English): Specification for definition and measurement of semiconductor equipment reliability, availability and maintainability (RAM) Sector / Industry: National Standard (Recommended) Classification of Chinese Standard: L85 Classification of International Standard: 17.040.30 Word Count Estimation: 33,380 Date of Issue: 2009-10-15 Date of Implementation: 2009-12-01 Quoted Standard: SEMI E35; SEMI E58; SEMI E79; SEMI E116 Adopted Standard: SEMI E10-0304, MOD Regulation (derived from): Announcement of Newly Approved National Standards No. 11 of 2009 (No. 151 overall) Issuing agency(ies): General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China Summary: This standard defines the device 's six basic state, all of the equipment conditions and stages must be owned by people of these six states. Determined by the functional status of the device, regardless of who is going to perform this function. This specification equipment involved mainly in the reliability of measurement equipment failure and the relationship between use of the equipment, rather than equipment failure and device experiences (calendar) the relationship between the total time. Chapter 5 of this standard (device state) defines the device 's time is how to classify, Chapter 6 (RAM measurement) to determine the measuring device performance formula. Chapter 7 (uncertainty of measurement) gives the calculated using statistics to evaluate the performance measure approach. The effective implementation of this standard, requiring devices (RAM) performance can be equipment uptime and cycle track. Automatic tracking of the equipment does not belong to the state of the scope of this standard, it is covered by the SEMI E58. Between users and suppliers can communicate clearly and effectively promote the continuous improvement of device performance. This standard indicators of RAM and the entire device can be directly applied to subsystem level non-clustered device, you can also sub-system level (eg technology modules) for multi- path cluster device. GB/T 24468-2009: Specification for definition and measurement of semiconductor equipment reliability, availability and maintainability (RAM)---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order. Specification for definition and measurement of semiconductor equipment reliability, availability and maintainability (RAM) ICS 17.040.30 L85 National Standards of People's Republic of China Semiconductor equipment reliability, availability and maintainability (RAM) of the definition and measurement specifications Posted 2009-10-15 2009-12-01 implementation Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China Standardization Administration of China released Table of ContentsIntroduction Ⅲ Objective 1 2 Range 1 3 Normative references 1 4 Terms and definitions State equipment 4 5 6 RAM measuring 8 7 uncertainty of measurement 11 8 reliability growth or degradation measuring 13 9 clusters measuring device RAM 13 Appendix A (normative) Confidence Limits Coefficient 14 Appendix B (normative) Measurement cluster device RAM 17 Annex C (informative) reliability growth or degradation model 27ForewordThis revised standard adopts SEMIE10-0304 "equipment reliability, availability and maintainability (RAM) of the definition and measurement specifications." This standard compared with SEMIE10-0304, do the following editorial changes. --- Chapter 4 Terms and definitions rearranged in accordance with national standards written format requirements. --- The standard according to GB/T 1.1 rearrange the requirements of the number. --- Appendix A of this standard corresponds SEMIE10-0304 in Annex 1. --- Appendix B of this standard corresponds SEMIE10-0304 in Annex 2. --- Appendix C of this standard corresponds SEMIE10-0304 related information 1. This standard Annex A, Annex B is normative appendix Appendix C are informative appendices. The standard proposed by the National Semiconductor Equipment and Materials Standardization Technical Committee. This standard is under the jurisdiction of the National Semiconductor Equipment and Materials Standardization Technical Committee. This standard was drafted. China Electronics Standardization Institute. The main drafters of this standard. Huang Yinghua, Liu Yun, Zhang Jianyong, Jiang Di Bao. Semiconductor equipment reliability, availability and maintainability (RAM) of the definition and measurement specifications Objective 1 This standard by providing a semiconductor manufacturing apparatus (hereinafter referred to as the device) in a manufacturing environment reliability, availability and serviceability (hereinafter He said RAM) performance measurement standards, establish a common basis for the exchange of user and device suppliers of such equipment.2 range2.1 standard defines six basic status of the equipment, all the equipment and conditions must be included in this phase of six states. Status of the device It is determined by the function, regardless of who performs this function. Measuring equipment reliability in this specification are involved mainly in equipment failure And the relationship between equipment used, and the relationship (calendar) time is not always experienced equipment failure and equipment between. 2.2 Standard Chapter 5 (state of the device) defines the time the device is how to classify it, Chapter 6 (RAM measurement) to determine the measurement devices Formula prepared performance. Chapter 7 (uncertainty of measurement) gives statistically the calculated value method for evaluating performance. Effective implementation of the 2.3 standard, requiring the device (RAM) running performance can be tracked through time and cycle of the equipment. Equipment Automatic tracking status does not fall within the scope of this standard, it is covered by SEMIE58. Clear between users and providers to communicate effectively It can contribute to the continuous improvement of equipment performance. 2.4 standard RAM can be directly applied to the non-clustered index on the entire device and subsystem level devices, can also be in the subsystem Level (for example, the process module) for multi-way clustering device. NOTE. This standard does not resolve any security issues related to the use of standards. Responsibility of the user of this standard to establish appropriate safety and health practices and the use of Before making regulations and other restrictions.3 Normative ReferencesThe following documents contain provisions which, through reference in this standard and become the standard terms. For dated references, subsequent Amendments (not including errata content) or revisions do not apply to this standard, however, encourage the parties to the agreement are based on research Whether the latest versions of these documents. For undated reference documents, the latest versions apply to this standard. Sovereignty cost SEMIE35 semiconductor manufacturing equipment measurement SEMIE58 automation reliability, availability and maintainability standards Defining and measuring equipment standard SEMIE79 Productivity SEMIE116 track equipment performance specifications4 Terms and DefinitionsThe following terms and definitions apply to this standard. 4.1 Under specified conditions, the ability of the device to perform its intended function within a certain time. 4.2 When needed, the device is able to perform its intended function the possibility of the state. 4.3 Within the specified time, the possibility of holding the device or restore to the state capable of performing its intended function of. ...... |
