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GB/T 20726-2025 English PDF

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GB/T 20726-2025: Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers(EDS)for use with a scanning electron microscope (SEM)or an electron probe microanalyser(EPMA)
Status: Valid

GB/T 20726: Historical versions

Standard IDUSDBUY PDFLead-DaysStandard Title (Description)Status
GB/T 20726-2025354 Add to Cart 4 days Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers(EDS)for use with a scanning electron microscope (SEM)or an electron probe microanalyser(EPMA) Valid
GB/T 20726-201590 Add to Cart Auto, < 3 mins Microbeam analysis -- Selected instrumental performance parameters for the specification and checking of energy dispersive X-ray spectrometers for use in electron probe microanalysis Valid
GB/T 20726-2006439 Add to Cart 3 days Instrumental specification for energy dispersive X-ray spectrometers with semiconductor detectors Obsolete


Basic data

Standard ID: GB/T 20726-2025 (GB/T20726-2025)
Description (Translated English): Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers(EDS)for use with a scanning electron microscope (SEM)or an electron probe microanalyser(EPMA)
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: N33
Classification of International Standard: 71.040.99
Word Count Estimation: 18,137
Date of Issue: 2025-08-29
Date of Implementation: 2026-03-01
Older Standard (superseded by this standard): GB/T 20726-2015
Issuing agency(ies): State Administration for Market Regulation, National Standardization Administration

GB/T 20726-2025: Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers(EDS)for use with a scanning electron microscope (SEM)or an electron probe microanalyser(EPMA)



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ICS 71.040.99 CCSN33 National Standard of the People's Republic of China Replaces GB/T 20726-2015 Microbeam analysis scanning electron microscopy (SEM) or Electron probe microanalyzer (EPMA) uses X-ray Energy dispersive spectrometer (EDS) main performance parameters and verification methods (ISO 15623.2021, IDT) Released on August 29, 2025, implemented on March 1, 2026 State Administration for Market Regulation The National Standardization Administration issued

Table of Contents

Preface III Introduction IV 1 Scope 1 2 Normative references 1 3 Terms and Definitions 1 4 Requirement 3 4.1 General Principles 3 4.2 Energy Resolution 3 4.3 Dead Time 4 4.4 Peak to back ratio 4 4.5 Energy Dependence of Instrument Detection Efficiency 5 Other performance parameter verification 4 5.1 Overview 4 5.2 Stability of energy scale and resolution 4 5.3 Pile-up Effect 4 5.4 Regular verification of spectrometer performance 5 Appendix A (Normative) Determination of line width (peak half-height width) of energy resolution of energy spectrometer 6 A.1 Specimen 6 A.2 Sample preparation 6 A.3 Preparation 6 A.4 Measurement conditions 6 A.5 Background Subtraction 6 A.6 Calculation of peak half-width (FWHM) A.7 Example 7 Appendix B (Normative) Determination of the L/K ratio, an energy-related indicator of instrument detection efficiency 9 B.1 Specimen 9 B.2 Measurement Conditions 9 B.3 Calculation of L/K ratio 9 B.4 Conversion of L/K ratio when ToA is not equal to 35° 9 Reference 11 Preface This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1.Structure and drafting rules for standardization documents" Drafting. This document replaces GB/T 20726-2015 "Main performance parameters and core Compared with GB/T 20726-2015, in addition to structural adjustments and editorial changes, the main technical changes are as follows. --- Changed the definition of "dead time" to make it more detailed (see 3.4, 3.4 of the.2015 edition); --- Added the content of "Terms and Definitions". Zero peak (see 3.14); --- Changed the requirements for “energy resolution”, “dead time” and “peak-to-background ratio” (see Chapter 4, Chapter 4 of the.2015 edition). This document is equivalent to ISO 15632.2021 "Microbeam analysis scanning electron microscope (SEM) or electron probe microanalyzer (EP- "Main performance parameters and verification methods of X-ray energy dispersive spectrometer (EDS) for MA". Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents. This document was proposed and coordinated by the National Microbeam Analysis Standardization Technical Committee (SAC/TC38). This document was drafted by. Institute of Geology and Geophysics, Chinese Academy of Sciences, Beijing Institute of Geology, Chinese Academy of Sciences, Institute of Chemistry, Chinese Academy of Sciences Institute. The main drafters of this document are. Mao Qian, Fan Guang, Wang Yanhua, Zeng Rongshu, and Yuan Jiangyan. The previous versions of this document and the documents it replaces are as follows. ---First published as GB/T 20762-2006 in.2006 and first revised in.2015; ---This is the second revision.

introduction

Based on the improvement of detector crystal manufacturing technology and the application of advanced pulse processing technology, the progress of X-ray energy dispersive spectrometer (EDS) technology has increased. The overall performance of the spectrometer is enhanced, especially in the high count rate and low energy (below 1keV) region. (SDD) technology has successfully replaced Si-Li detectors and is comparable to Si-Li detectors even at very high count rates. In addition, smaller detector capacitance means a larger detector area and ultra-high count rate measurement capability. New performance parameters for evaluating such modern detectors have been developed. The characteristics of the spectrometer are usually expressed in terms of energy resolution at high energy, which is defined as the full width at half maximum (FWHM) of the MnKα peak. In the low energy range, manufacturers usually give the half-height width of the carbon or fluorine K peak or the half-height width of the zero peak. Some manufacturers also use peak Back-to-back ratio is expressed as the ratio of the peak to the baseline in the 55Fe spectrum or the ratio of the peak to the valley in the boron spectrum. Definition. Compared with the high energy region, the sensitivity of the spectrometer at the low energy end depends largely on the detection crystal and the X-ray incident window. Manufacturers usually do not indicate the energy dependence of spectrometer performance, and high sensitivity at the low energy end is very important for analyzing light element compounds. Very important. This document has been revised to meet the minimum requirements for the development of EDS specifications worldwide. Comparison of the performance of spectrometers of different designs based on the same parameters specified in this document is also helpful for The document also facilitates inter-laboratory comparisons. [1], these laboratories shall regularly check the calibration status of instruments according to the prescribed procedures. This document serves as a reference for all relevant test laboratories to develop this Guidelines for class procedures. Microbeam analysis scanning electron microscopy (SEM) or Electron probe microanalyzer (EPMA) uses X-ray Energy dispersive spectrometer (EDS) main performance parameters and verification methods

1 Scope

This document specifies the most important components of an X-ray spectrometer based on a semiconductor detector, a preamplifier, and a signal processing system. Characteristic parameters. This document is only applicable to spectrometers using semiconductor detectors based on the solid-state ionization principle. This document specifies the performance of such spectrometers when used in conjunction with a scanning electron microscope (SEM) or an electron probe microanalyzer (EPMA) The procedures for energy spectrum analysis are specified in ISO 22309[2] and ASTM E1508[3] and are not included in this document. within the scope of the file.

2 Normative references

The contents of the following documents constitute the essential clauses of this document through normative references in this document. For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to This document. copy-Vocabulary) Note. GB/T 23414-2009 Microbeam analysis scanning electron microscopy terminology (ISO 22439.2008, IDT) ISO 23833 Microbeam analysis - Electron probe microanalysis (EPMA) - Terminology Note. GB/T 21636-2021 Microbeam analysis Electron probe microanalysis (EPMA) Terminology (ISO 23833.2013, IDT)

3 Terms and Definitions

For the purposes of this document, the terms and definitions defined in ISO 23833, ISO 22493 and the following apply. Note. Except for 3.1, 3.2, 3.2.1, 3.2.2, 3.9, 3.11, 3.12, 3.13 and 3.14, the others are the same as ISO 22309[2], ISO 18115-1[4] and ISO 23833 or similar formal definitions. 3.1 energy-dispersive X-ray spectrometer A device that measures the intensity of X-rays as a function of radiation energy by recording the entire X-ray spectrum. Note. The spectrometer consists of a solid-state detector, a preamplifier and a pulse processor. The detector converts X-ray photons into electrical pulses, which are then processed by the preamplifier. Signal amplification. The pulse processor classifies the pulses according to their amplitude and forms a histogram distribution of X-ray signal intensity (3.8) versus energy. 3.2 Count rate Number of X-ray photons per second. 3.2.1 input count rateinputcountrate ICR The number of X-ray photons received by the detector per second.
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