GB/T 16879-1997 English PDF

US$209.00 · In stock
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GB/T 16879-1997: Guidelines for precision and accuracy expression for mask writing equipment

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
GB/T 16879-1997	209	Add to Cart	3 days	Guidelines for precision and accuracy expression for mask writing equipment

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Basic data

Standard ID: GB/T 16879-1997 (GB/T16879-1997)
Description (Translated English): Guidelines for precision and accuracy expression for mask writing equipment
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: L97
Classification of International Standard: 31.02
Word Count Estimation: 6,662
Date of Issue: 6/20/1997
Date of Implementation: 3/1/1998
Adopted Standard: SEMI P21-1992, IDT
Issuing agency(ies): State Bureau of Technical Supervision
Summary: This standard specifies the general requirements for the device when said mask exposure precision and accuracy in the follow. The precision and accuracy of the pattern exposure apparatus through an exposure mask is a mask made ??of the measurement to evaluate the mask manufacturing process conditions it has a great influence. Therefore, the exposure conditions to be agreed by manufacturers and users of both.

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