GB/T 16878-1997 English PDF

US$389.00 · In stock
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GB/T 16878-1997: Specification for metrology pattern cells for integrated circuit manufacture

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
GB/T 16878-1997	389	Add to Cart	3 days	Specification for metrology pattern cells for integrated circuit manufacture

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Basic data

Standard ID: GB/T 16878-1997 (GB/T16878-1997)
Description (Translated English): Specification for metrology pattern cells for integrated circuit manufacture
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: L97
Classification of International Standard: 31.02
Word Count Estimation: 11,126
Date of Issue: 6/20/1997
Date of Implementation: 3/1/1998
Adopted Standard: SMEI P19-1992, IDT
Issuing agency(ies): State Bureau of Technical Supervision
Summary: This standard specifies several standard test patterns for micro graphics device used in the production of integrated circuits, measurement instruments and processes consistent with the comprehensive assessment and testing. The standard width for the needs of metrology, resolution test and proximity effects testing requirements for certain types of test patterns shape the basic unit, the general size, and the recommended layout and design rules. These include standard graphics available optical microscopy, electron microscopy and electron microprobe measurements with various graphic elements. This standard does not specify the measurement techniques to verify the size of the master key test pattern, nor specify how to measure the resist pattern on the wafer, the only requirements for certain kinds of necessary basic test pattern, and the user's actual implementation in line with the standard test pattern.

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