JJF 1100-2016 (JJF1100-2016) & related versions
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Calibration Specification for Flat Equal Thickness Interferometers
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JJF 1100-2016
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| JJF 1100-2003 | English | 559 |
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Calibration Specification for Flat Equal Thickness Interferometers
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JJF 1100-2016: PDF in English
JJF 1100-2016
Calibration Specification for Flat Equal Thickness Interferometers
National Metrological Technical Code of the People's Republic of China
Standard for Equal Thickness Interferometer Calibration
2016-11-30 release
2017-05-30 implementation
State Administration of Quality Supervision, Inspection and Quarantine issued
Standard for Equal Thickness Interferometer Calibration
Replacing JJF 1100-2003
Coordinate Unit. National Geometric Engineering Parameter Measurement Technical Committee
The main drafting unit. China Testing Technology Research Institute
China Institute of Metrology
Participated in the drafting unit. Institute of Optoelectronic Technology, Chinese Academy of Sciences
Test Technology Co., Ltd. in the test
The specification commissioned by the National Geometric Engineering Engineering Metrology Technical Committee is responsible for the interpretation
The main drafters of this specification.
Ran Qing (China Testing Technology Research Institute)
Zhang Heng (China Institute of Metrology)
Zhao xiaoping (China Test Technology Research Institute)
Kang Yanhui (China Institute of Metrology)
Participate in the drafters.
WU Shi-bin (Institute of Optoelectronic Technology, Chinese Academy of Sciences)
Xu Deyu (China Testing Technology Research Institute)
Qingguang Asia (in the test test Technology Co., Ltd.)
table of Contents
Introduction (II)
1 range (1)
2 References (1)
3 Overview (1)
4 Metrological characteristics (3)
4.1 Repeatability of interference fringe pitch measurements (3)
4.2 Test error of micrometer eyepiece (3)
4.3 The amount of interference fringes caused by the objective system (3)
4.4 Instrument indication error (3)
5 Calibration conditions (3)
5.1 Environmental conditions (3)
5.2 Calibration items and measuring standards and other equipment (3)
6 Calibration method (4)
6.1 Repeatability of Interference Fringe Spacing (4)
6.2 test eyepiece of the indication error (4)
6.3 The amount of interference fringes caused by the objective system (4)
6.4 Indication error of instrument (5)
7 Expression of calibration results (5)
8 Recurrence time interval (5)
Appendix A Graphic and Introduction of Planar Equal Thickness Interference Fringe Measurements (6)
APPENDIX B Example of Uncertainty Evaluation of Indication Error of Planar Equal Thickness Interferometer (7)
Appendix C Calibration Certificate Information and Format (10)
introduction
JJF 1071-2010 "Rules for the preparation of national metrological calibration specifications", JJF 1001-2011 "General measurement terms and
Definitions "and JJF 1059.1-2012" Measurement Uncertainty Assessment and Representation "together constitute support for this calibration specification revision
Work of the basic series of norms.
Compared with JJF 1100-2003 "flat equal thickness interferometer calibration standard", this specification, in addition to editorial changes, the main
The technical changes are as follows.
--- This specification eliminates the accuracy of the instrument on the plane equal thickness interferometer grading;
--- This specification eliminates the "no standard plane flat crystal plane equal thickness interferometer indication error can not measure" this
Regulations;
--- This specification adds an illustration and brief introduction to Appendix A. Method of measurement of plane equal thickness interference fringes;
--- The specification of the plane equal thickness interferometer indication error measurement is recommended by two φ150mm first-class standard plane
Flat crystal according to its two measurement cross-section one by one corresponding measurement method to obtain, and retain the original specification with three second-level flat crystal mutual inspection
method;
--- This specification eliminates the "recommended no more than one year" clause in the re-election interval, and the calibration interval is
According to their own business to determine the situation.
The previous versions of this specification are released.
--- JJF 1100-2003 "flat equal thickness interferometer calibration specification";
--- JJG336-1983 "plane equal thickness interferometer".
Standard for Equal Thickness Interferometer Calibration
1 Scope
This specification applies to the calibration of planar equal thickness interferometers.
2 reference file
This specification refers to the following documents.
JJG28-2000 flat crystal
JB/T 7401-1994 plane flat crystal
For dated references, only the dated edition applies to this specification; references that are not dated
, The latest version (including all amendments) applies to this specification.
3 Overview
Plane equal thickness interferometer (hereinafter referred to as instrument) is the use of equal thickness light interference principle for the object surface flatness
Measuring (or detecting) an optical instrument. According to the instrument structure is divided into standard flat crystal and standard flat crystal with two
Kind of plane equal thickness interferometer. Instrument shape and optical structure are shown in Figure 1, Figure 2, Figure 3 and Figure 4.
Figure 1 Outline structure without standard flat crystal interferometer
......
| Standard ID | JJF 1100-2016 (JJF1100-2016) | | Description (Translated English) | Calibration Specification for Flat Equal Thickness Interferometers | | Sector / Industry | Metrology & Measurement Industry Standard | | Classification of Chinese Standard | A52 | | Word Count Estimation | 15,153 | | Date of Issue | 2016-11-30 | | Date of Implementation | 2017-05-30 | | Older Standard (superseded by this standard) | JJF 1100-2003 | | Drafting Organization | China Institute of Testing Technology, China Institute of Metrology | | Administrative Organization | National Geometric Engineering Parameter Measurement Technical Committee | | Regulation (derived from) | State Administration of Quality Supervision, Inspection and Quarantine Notice No.119 of 2016 | | Issuing agency(ies) | State Administration of Quality Supervision, Inspection and Quarantine |
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