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GB/T 32293-2015: Vacuum technology -- Selection of leak test methods for vacuum equipment
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Vacuum technology -- Selection of leak test methods for vacuum equipment
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GB/T 32293-2015
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Basic data | Standard ID | GB/T 32293-2015 (GB/T32293-2015) | | Description (Translated English) | Vacuum technology -- Selection of leak test methods for vacuum equipment | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | J78 | | Classification of International Standard | 23.160 | | Word Count Estimation | 19,118 | | Date of Issue | 2015-12-10 | | Date of Implementation | 2016-07-01 | | Quoted Standard | GB/T 3163; GB/T 9445 | | Regulation (derived from) | National Standard Announcement 2015 No.38 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This standard specifies the personnel qualification requirements, general requirements, safety requirements for leak detection, selection procedures and selection principles, and characteristic parameters of leak detection methods for vacuum equipment leak detection methods. This standard applies to the selection of vacuum equipment leak detection methods. The applicable vacuum equipment includes vacuum vessel, vacuum pipe, vacuum pump, vacuum valve, vacuum coating equipment, vacuum drying equipment, vacuum freeze drying equipment, surface analysis equipment, vacuum metallurgy equipment, space Environmental simulation equipment, semiconductor production equipment, such as vacuum equipment. Selection of leak detection methods for other equipment in operation involving a vacuum may also be performed with reference to this standard. | GB/T 32293-2015: Vacuum technology -- Selection of leak test methods for vacuum equipment---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Vacuum technology - Selection of leak test methods for vacuum equipment
ICS 23.160
J78
National Standards of People's Republic of China
Vacuum technology - Vacuum equipment - Leak detection method selection
2015-12-10 released
2016-07-01 implementation
General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China
China National Standardization Management Committee released
Directory
Preface III
1 Scope 1
2 normative reference document 1
3 Terms and definitions 1
4 Personnel Qualification 1
5 General requirements 2
6 Summary of leak detection method 2
7 Leak detection method selection procedure 3
8 selection of leak detection method 3
9 leak detection 5
Appendix A (Normative Appendix) Leakage correction for different leak conditions 6
Appendix B (normative appendix) Vacuum equipment commonly used leak detection method and the main characteristics of the parameters 8
Appendix C (informative) Vacuum equipment Other leak detection methods and main characteristic parameters 10
Foreword
This standard is drafted in accordance with the rules given in GB/T 1.1-2009.
This standard is proposed by the China Machinery Industry Federation.
This standard is under the jurisdiction of the National Vacuum Technology Standardization Technical Committee (SAC/TC18).
The drafting of this standard. Beijing Institute of Satellite Environmental Engineering, China Institute of Space Technology Lanzhou Institute of Space Technology and Physics, Anhui
Anhui Instrument Technology Co., Ltd., Taizhou Global Vacuum Equipment Manufacturing Co., Ltd., Hunan Weige Magneto-Fluid Co., Ltd., Zhongshan Triumph Really
Air Technology Engineering Co., Ltd., Weihai Zhide Vacuum Technology Co., Ltd., Dongguan Jin Sheng Precision Components Co., Ltd., Shenyang vacuum technology research
Institute.
The main drafters of this standard. Sun Lichen, Shi Jijun, Li Derian, Liu Enjun, Wang Li, Yan Rongxin, Zhang Chunyuan, Sun Gang, Chen Guangqi, Liu Lei,
Huang Wenping, Zhao Weisheng, Zhao Jichun, Yan Jichun, Wang Gongfa, Yan Runquan, Gao Feng, Hu Shuangli, Lin Lezhong, Wang Changming, Wang Lingling.
Vacuum technology - Vacuum equipment - Leak detection method selection
1 Scope
This standard specifies the personnel requirements for the selection of leak detection methods for vacuum equipment, general requirements, safety requirements for leak detection, selection procedures
And the selection principle, the characteristic parameter of the leak detection method.
This standard applies to the selection of leak detection methods for vacuum equipment. Suitable vacuum equipment includes vacuum containers, vacuum pipes, vacuum pumps, vacuum valves
Door, vacuum coating equipment, vacuum drying equipment, vacuum freeze-drying equipment, surface analysis equipment, vacuum metallurgy equipment, space environment simulation set
Equipment, such as semiconductor equipment, vacuum equipment. Please refer to this standard for the selection of leak detection methods for other equipment in the vacuum state
carried out.
2 normative reference documents
The following documents are indispensable for the application of this document. For dated references, only the dated edition applies to this article
Pieces. For undated references, the latest edition (including all modifications) applies to this document.
Vacuum Technology Terminology GB/T
GB/T 9445 Non - destructive testing personnel qualification and certification
3 terms and definitions
The following definitions and definitions as defined in GB/T 3163 apply to this document.
3.1
Leakage leakagerate
Under certain conditions, the flow of a particular gas through the leak.
3.2
Effective minimum leak rate effectiveminimumdetectableleakagerate
qemin
Under the specific working conditions, the leak detection method can detect the minimum leakage rate.
3.3
Allow leak rate acceptableleakagerate
Vacuum equipment can work to accept the maximum leakage rate.
3.4
Viscous leaks
The mass flow rate of the leak is inversely proportional to the viscosity of the flowing gas.
3.5
Molecular leakage
The mass flow rate of the leak is proportional to the reciprocal of the square root of the flow gas molecular weight.
4 Personnel qualification
It is recommended that the personnel who have selected the leak detection method should have Level 2 or Level 2 required by GB/T 9445.
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