| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | See Detail | Status | Related Standard |
| GB/T 28275-2012 | English | 259 |
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Days<=3
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Silicon-based MEMS fabrication technology -- Specification for KOH etch process
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GB/T 28275-2012
| Valid |
GB/T 28275-2012
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