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GB/T 42721-2023: Electronic specialty gas - Nitric oxide
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| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 42721-2023 | English | 269 |
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Electronic specialty gas - Nitric oxide
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GB/T 42721-2023
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Basic data | Standard ID | GB/T 42721-2023 (GB/T42721-2023) | | Description (Translated English) | Electronic specialty gas - Nitric oxide | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G86 | | Classification of International Standard | 71.100.20 | | Word Count Estimation | 14,183 | | Date of Issue | 2023-08-06 | | Date of Implementation | 2024-03-01 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 42721-2023: Electronic specialty gas - Nitric oxide---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
ICS 71.100.20
CCSG86
National Standards of People's Republic of China
Electronic special gas nitric oxide
Published on 2023-08-06
2024-03-01 Implementation
State Administration for Market Regulation
Released by the National Standardization Administration Committee
Foreword
This document complies with the provisions of GB/T 1.1-2020 "Standardization Work Guidelines Part 1.Structure and Drafting Rules of Standardization Documents"
Drafting.
Please note that some content in this document may be subject to patents. The publisher of this document assumes no responsibility for identifying patents.
This document is proposed and coordinated by the National Semiconductor Equipment and Materials Standardization Technical Committee (SAC/TC203).
This document was drafted by. Dalian Kelide Optoelectronic Materials Co., Ltd., Haohua Gas Co., Ltd., Baitong Standardization, Nanxun District, Huzhou City
Research Institute, CSSC (Handan) Perry Special Gas Co., Ltd., Guangdong Huate Gas Co., Ltd., Suzhou Jinhong Gas Co., Ltd.
Company, Jiangxi Huate Electronic Chemicals Co., Ltd., CTI Testing and Certification Group Co., Ltd., Luling Electronic Materials (Tianjin) Co., Ltd.,
Beijing Gomax Instrument Technology Co., Ltd., China Three Gorges University, Hubei Heyuan Gas Co., Ltd., Hubei Beijing Rui Gas Co., Ltd., Lanzhou Yu
Long Gas Co., Ltd., Yumen Dayang Tianqing Petrochemical Co., Ltd., Haohua Gas Co., Ltd. Southwest Branch, Zhonghao Guangming Chemical Industry
Research and Design Institute Co., Ltd., Shanghai Shennan Special Gas Co., Ltd., Shanghai Huaai Chromatography Analysis Technology Co., Ltd., Dalian Date Gas Co., Ltd.
Co., Ltd., Shanghai Institute of Metrology and Testing Technology, China Institute of Metrology, Hangzhou New Century Mixed Gas Co., Ltd., Suzhou Yvit
New Materials Co., Ltd., Lianxiong Investment (Shanghai) Co., Ltd., Hangyang Group Co., Ltd., Quzhou Hangyang Special Gas Co., Ltd., Shanghai
Fanwei Instrument Equipment Co., Ltd., Zhejiang Hongxin Semiconductor Co., Ltd., Bruker (Beijing) Technology Co., Ltd., Air Chemical Products (China)
Investment Co., Ltd., Zhejiang Juhe Technology Co., Ltd., Shaoxing Keyi Standard Technology Consulting Co., Ltd., Shenyang Zhongfu Kejin Pressure Vessel Co., Ltd.
Company, Zhejiang Seat Electronic Materials Co., Ltd., Zhejiang Dongkai Semiconductor Technology Co., Ltd., Heli Gas (Shanghai) Co., Ltd., Kunming Guangzhou
Ruida Special Gas Co., Ltd., Southwest Chemical Research and Design Institute Co., Ltd.
The main drafters of this document. Shi Yini, Fu Mengyue, Chen Hui, Liu Ying, Jiao Peipei, Guo Qiong, Zhang Tianze, Li Xiangyu, Yuan Ruiling, Shao Zhiping,
Fu Zhuhong, Chen Yanshan, Jin Xianghua, Sun Meng, Liao Hengyi, Ru Gaoyi, Cao Xuefeng, Tang Ping, Niu Yandong, Li Changjian, Ma Binqi, Du Dayan, Cao Xiaolin,
Fang Qiang, Yuan Youlu, Wang Xiaobo, Yin Aihua, Chang Xia, Bian Luning, Yang Hui, Wang Zhenghong, Chen Jie, Wu Liang, Fang Hua, Wang Zhaobin, Yu Qingwei, Gao Yanqiu,
Hao Ping, Wang Defa, Zhang Tiqiang, Zhang Jinbo, Yang Jinshan, Qin Yuanwang, He Bo, Yang Kang, Huang Hui, Han Yisong, Mao Lingling, Wu Huiming, Lan Feng, Shang Baiyang,
Geng Chaoxi, Wang Jing, Li Qian, Dong Shuo, Gu Dazheng, Gong Bing, Wang Dawei, Yang Li, Qian Yechao, Wu Qiankang, Liang Yongqiang, Liang Chengke, Gao Jing, Ma Changning,
Zhao Gang, Lai Xiaofeng, Zhou Pengyun.
Electronic special gas nitric oxide
1 Scope
This document specifies the technical requirements, sampling, test methods, inspection rules, marking, packaging, transportation, storage and safety information of nitric oxide
requirements.
This document applies to electronic nitric oxide used in the manufacturing of integrated circuits and other electronic industries.
2 Normative reference documents
The contents of the following documents constitute essential provisions of this document through normative references in the text. Among them, the dated quotations
For undated referenced documents, only the version corresponding to that date applies to this document; for undated referenced documents, the latest version (including all amendments) applies to
this document.
GB 190 Dangerous goods packaging markings
GB/T 5099 (all parts) Steel seamless gas cylinders
GB/T 5832.3 Determination of trace moisture in gases Part 3.Cavity ring-down spectroscopy
GB/T 7144 Gas cylinder color marking
GB/T 8979 Pure nitrogen, high-purity nitrogen and ultra-pure nitrogen
GB/T 11640 Aluminum alloy seamless gas cylinder
GB/T 14194 Compressed gas cylinder filling regulations
GB 15258 Regulations on Preparing Chemical Safety Labels
GB/T 16804 Gas cylinder warning label
GB/T 28726 Gas analysis helium ionization gas chromatography
TSGR0005 Safety Technical Supervision Regulations for Mobile Pressure Vessels
TSG23 Gas Cylinder Safety Technical Regulations
ISO 19230 Gasanalysis-Samplingguidelines
3 Terms and definitions
There are no terms or definitions to be defined in this document.
4 Technical requirements
The technical requirements for nitric oxide should comply with the provisions of Table 1.
Table 1 Technical requirements
Project indicators
Nitric oxide (NO) purity (mole fraction)/10-2 ≥99.9
(Oxygen Argon)(O2 Ar) content (mole fraction)/10-6 < 5
Nitrogen (N2) content (mole fraction)/10-6 < 500
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