|
US$189.00 ยท In stock
Delivery: <= 3 days. True-PDF full-copy in English will be manually translated and delivered via email.
GB/T 42674-2023: Optical functional films - Measurement method for microstructure thickness
Status: Valid
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 42674-2023 | English | 189 |
Add to Cart
|
3 days [Need to translate]
|
Optical functional films - Measurement method for microstructure thickness
| Valid |
GB/T 42674-2023
|
PDF similar to GB/T 42674-2023
Basic data | Standard ID | GB/T 42674-2023 (GB/T42674-2023) | | Description (Translated English) | Optical functional films - Measurement method for microstructure thickness | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G15 | | Classification of International Standard | 71.080.99 | | Word Count Estimation | 10,138 | | Date of Issue | 2023-08-06 | | Date of Implementation | 2024-03-01 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 42674-2023: Optical functional films - Measurement method for microstructure thickness---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
ICS 71.080.99
CCSG15
National Standards of People's Republic of China
Test method for microstructure thickness of optically functional films
Published on 2023-08-06
2024-03-01 Implementation
State Administration for Market Regulation
Released by the National Standardization Administration Committee
Foreword
This document complies with the provisions of GB/T 1.1-2020 "Standardization Work Guidelines Part 1.Structure and Drafting Rules of Standardization Documents"
Drafting.
This document was drafted with reference to ISO 9220.2022 "Scanning Electron Microscope Test Method for Coating Thickness of Metal Coatings", and the degree of consistency is not equivalent.
Please note that some content in this document may be subject to patents. The publisher of this document assumes no responsibility for identifying patents.
This document is proposed by China Petroleum and Chemical Industry Federation.
This document is under the jurisdiction of the National Standardization Technical Committee for Optical Functional Thin Film Materials (SAC/TC431).
This document was drafted by. China Lekai Group Co., Ltd., Hefei Lekai Technology Industry Co., Ltd., Hengshan Jiacheng New Materials Co., Ltd.
Division, Zhejiang Yaoyang New Material Technology Co., Ltd., Shenzhen Zongheng Standard Technology Co., Ltd., Kaixinsen (Shanghai) Functional Film Industry Co., Ltd.
Co., Ltd., Dongguan Guangzhi Optoelectronics Co., Ltd.
The main drafters of this document. Xia Jiangnan, Gao Jianhui, Jiang Ning, Zhao Shuo, Tian Kun, Han Mingxing, Cheng Yuan, Li Zong, Liu Yulei, Liu Wenliang, Yao Yifan,
Li Wenzhan, Zhao Jianming, Cao Jian, Zhou Peng, Luo Huibin.
Test method for microstructure thickness of optically functional films
1 Scope
This document describes the detection of cross-sectional microstructure thickness of optically functional thin films (hereinafter referred to as thin films) by scanning electron microscopy (SEM).
(hereinafter referred to as cross-sectional thickness) method.
This document is applicable to the thickness test of single-layer or multi-layer structures of optical functional films with a thickness of not less than 50nm.
2 Normative reference documents
The contents of the following documents constitute essential provisions of this document through normative references in the text. Among them, the dated quotations
For undated referenced documents, only the version corresponding to that date applies to this document; for undated referenced documents, the latest version (including all amendments) applies to
this document.
GB/T 27788 Guidelines for calibration of magnification of scanning electron microscope images for microbeam analysis
GB/T 33376 Optical functional film terms and definitions
3 Terms and definitions
The terms and definitions defined in GB/T 33376 and the following apply to this document.
3.1
Original film and functional film with excellent optical properties for flat panel displays.
[Source. GB/T 33376-2016, 2.1.19, modified]
4 Principles
A sample is cut from the sample to be tested, and the cross section of the sample is ground, polished, etched, and ultra-thin sectioned. Use corrected
SEM measures cross-sectional thickness.
NOTE. Appendix A gives guidance.
5 Instruments and Equipment
5.1 SEM
The resolution should be less than 50nm.
5.2 SEM stage micrometer ruler
For the magnification used to calibrate the SEM, the error value of the uncertainty should be less than 5%.
6 Factors affecting measurement accuracy
6.1 Rough surface
If the cross-section of the sample or the surface of the substrate is rough, the interface line of the cross-section will be irregular, making it impossible to accurately measure the thickness.
|