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GB/T 40129-2021: Surface chemical analysis - Secondary ion mass spectrometry - Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
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Surface chemical analysis - Secondary ion mass spectrometry - Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
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GB/T 40129-2021
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Basic data | Standard ID | GB/T 40129-2021 (GB/T40129-2021) | | Description (Translated English) | Surface chemical analysis - Secondary ion mass spectrometry - Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G04 | | Word Count Estimation | 18,189 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 40129-2021: Surface chemical analysis - Secondary ion mass spectrometry - Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
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Surface chemical analysis-Secondary ion mass spectrometry-Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
ICS 71.040.40
CCSG04
National Standards of People's Republic of China
Surface Chemical Analysis Secondary Ion Mass Spectrometry
Mass standard calibration of time-of-flight secondary ion mass spectrometer
(ISO 13084.2018, IDT)
Released on 2021-05-21
2021-12-01 implementation
State Administration of Market Supervision and Administration
Issued by the National Standardization Management Committee
Table of contents
Foreword Ⅲ
Introduction Ⅳ
1 Scope 1
2 Normative references 1
3 Terms and definitions 1
4 Symbols and abbreviations 1
4.1 Symbol 1
4.2 Abbreviations 2
5 Method overview 2
6 Methods to improve quality accuracy 3
6.1 Obtaining reference samples for optimization 3
6.2 Preparation of polycarbonate sample 3
6.3 Obtain SIMS mass spectrum data 3
6.4 Calculating the accuracy of mass 3
6.5 Optimizing instrument parameters 5
6.6 Spectral calibration procedure 7
Appendix A (Informative) Calibration Uncertainty 9
Appendix B (informative) Internal addition method 10
Reference 12
Foreword
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for Standardization Work Part 1.Structure and Drafting Rules of Standardization Documents"
Drafting.
This document uses the translation method equivalent to ISO 13084.2018 ``Surface Chemical Analysis Secondary Ion Mass Spectrometry Time of Flight Secondary Ion
Mass spectrometer mass standard calibration".
Please note that some of the contents of this document may involve patents. The issuing agency of this document is not responsible for identifying patents.
This document was proposed and managed by the National Microbeam Standardization Technical Committee (SAC/TC38).
Drafting organization of this document. Sun Yat-sen University.
The main drafters of this document. Chen Jian, Xie Fangyan, Gong Li, Yang Muzi, Yang Hao, Zhang Hao, Zhang Weihong.
Introduction
Secondary ion mass spectrometry (SIMS) is a method used to analyze organic and molecular surfaces
Powerful technology. In the past ten years, secondary ion mass spectrometry instruments have been significantly improved, so modern instruments have a very high weight.
Refolding and stability [2], and the need to determine the chemical composition of complex molecules by accurately measuring the mass of secondary ions is increasing. because
This does this and distinguishes relative molecules that contain different chemical components but have the same nominal mass (rounded to the nearest integer mass).
Quality accuracy is an important parameter. A relative mass accuracy better than 10×10-5 is required to distinguish the parent ion with a total mass of up to 1000u
C2H4 (28.03130u) and Si (27.97692u) and the parent ion with a total mass of up to 300u CH2 (14.01565u) and
N (14.00307u). However, in a recent inter-laboratory study [3], it was found that the average mass accuracy of the fragments was 1.5×10-4.It's obvious
It is worse than the relative mass accuracy required to clearly identify ions. Detailed research shows that the key factors that reduce accuracy include secondary
Extrapolation of ion's wide kinetic energy distribution, non-optimized instrument parameters and mass scale calibration.
This document describes a simple method and procedure for optimizing instrument parameters using local materials to ensure that there is a selectable uncertainty
Achieve accurate calibration of quality standards within the scope.
Surface Chemical Analysis Secondary Ion Mass Spectrometry
Mass standard calibration of time-of-flight secondary ion mass spectrometer
1 Scope
This document describes a time-of-flight secondary ion mass spectrometry (SIMS) instrument used to optimize the mass calibration accuracy of general analytical purposes.
Degree method. This document only applies to time-of-flight instruments, but is not limited to any specific instrument design. This document provides an overview of some instruments
Guidelines for optimizing the parameters of the instrument, these parameters can be optimized using this program, and it also provides a calibration standard suitable for obtaining the best quality accuracy.
The general peak type of the degree.
2 Normative references
There are no normative references in this document.
3 Terms and definitions
There are no terms and definitions that need to be defined in this document.
The database of standardized terminology used by ISO and IEC is maintained at the following website.
4 Symbols and abbreviations
The following symbols and abbreviations apply to this document.
4.1 Symbols
m. quality to be tested
m1.Calibration quality 1
m2.Calibration quality 2
M. mass (u)
Mo. Peak center (u)
ΔM. mass accuracy (u)
MP. The mass of the measured peak (u)
MT. true quality (u)
U(m). The uncertainty of the mass m produced by calibration
U1.m1 Uncertainty of accurate mass measurement
U2.m2 Uncertainty of accurate mass measurement
U0.Average uncertainty of accurate mass measurement
VR. reflector or receiving voltage (V)
W. relative mass accuracy
x. number of carbon atoms
y. number of hydrogen atoms
Go. zoom item
α. Asymmetric term
σ(ΔM). The standard deviation of the mass accuracy of multiple peaks
σM. The average value of the standard deviation of ΔM for each of the four CxHy series with 4, 6, 7 and 8 carbon atoms
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