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GB/T 32386-2015: Gases for electronic industry -- Tungsten hexafluoride
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| GB/T 32386-2015 | English | 399 |
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Gases for electronic industry -- Tungsten hexafluoride
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GB/T 32386-2015
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Basic data | Standard ID | GB/T 32386-2015 (GB/T32386-2015) | | Description (Translated English) | Gases for electronic industry -- Tungsten hexafluoride | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G86 | | Classification of International Standard | 71.100.20 | | Word Count Estimation | 19,180 | | Date of Issue | 2015-12-31 | | Date of Implementation | 2016-07-01 | | Regulation (derived from) | State Standard Announcement 2015 No.43 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | GB/T 32386-2015: Gases for electronic industry -- Tungsten hexafluoride---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Gases for electronic industry - Tungsten hexaflouride
ICS 71.100.20
G86
National Standards of People's Republic of China
Electronic industrial gas tungsten hexafluoride
Issued on. 2015-12-31
2016-07-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
The standard equipment by the National Standardization Technical Committee and the semiconductor material (SAC/TC203) and focal points.
This standard was drafted. China Shipbuilding Industry Corporation Diqiyiba Institute of Xiamen Tungsten Co., Southwest Chemical Industry Research
Design Institute Limited, Shanghai, love Chromatography Technology Co., Ltd., Shanghai-UNITA Electronic Technology Co., Ltd.
The main drafters of this standard. Zhengqiu Yan, Jianghai wind, Zhan Wei, Fanglan Lan, Lin Zhuguang, Wang Zhi - xin, Fang Hua, Yang Ren, Zhou Pengyun.
Electronic industrial gas tungsten hexafluoride
1 Scope
This standard specifies the technical requirements of tungsten hexafluoride, test methods, packaging, labeling, storage and security.
This standard applies to chemical synthesis Preparation of purified and refined tungsten hexafluoride. The products are mainly used in the electronics industry, tungsten chemical
Vapor deposition process for preparing tungsten material or the like.
Molecular formula. WF6.
MW. 297.8304192 (according to 2009 international relative atomic mass calculation).
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB 190 packaging and marking of dangerous goods
GB/T 3723 Sampling of chemical products for industrial use General Safety
GB 5099 seamless steel gas cylinders
GB/T 5275.10 gas analysis dynamic volume Preparation of calibration gas mixtures - Part 10. Permeation
GB 7144 cylinders color logo
GB 14193 Rules for filling of liquefied gas cylinders
GB 15258 rules for preparation of chemical safety labels
GB 16804 cylinders warning labels
GB/T 26571 Specification of special gas storage
GB/T 28726 helium ionization gas analysis by gas chromatography
TJ36-79 Design of Industrial Enterprises hygiene standards
Gas Cylinder Safety Supervision (2000 Edition)
Dangerous Chemicals Regulations (2002 Edition)
Special Equipment Safety Supervision Regulations (2009 Edition)
3 Technical requirements
Tungsten hexafluoride technical indicators should be consistent with the requirements in Table 1.
Table 1 Technical Specifications
Project Name Index
Tungsten hexafluoride (WF6) purity (volume fraction)/10-2 ≥ 99.9 99.999 99.9995 99.9999
Carbon tetrafluoride (of CF4) content (volume fraction)/10-6 ≤ 10 0.5 0.5 0.1
Nitrogen (N2) content (volume fraction)/10-6 ≤ 50 1 0.5 0.1
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