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GB/T 12963-2014 (GBT12963-2014)

GB/T 12963-2014_English: PDF (GBT 12963-2014, GBT12963-2014)
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GB/T 12963-2014English90 Add to Cart 0--9 seconds. Auto-delivery Electronic-grade polycrystalline silicon Valid GB/T 12963-2014

BASIC DATA
Standard ID GB/T 12963-2014 (GB/T12963-2014)
Description (Translated English) Electronic-grade polycrystalline silicon
Sector / Industry National Standard (Recommended)
Classification of Chinese Standard H82
Classification of International Standard 29.045
Word Count Estimation 7,744
Date of Issue 2014/12/31
Date of Implementation 2015/9/1
Older Standard (superseded by this standard) GB/T 12963-2009
Quoted Standard GB/T 1550; GB/T 1551; GB/T 1553; GB/T 1557; GB/T 1558; GB/T 4059; GB/T 4060; GB/T 4061; GB/T 13389; GB/T 14264; GB/T 24574; GB/T 24581; GB/T 24582
Drafting Organization Emei Semiconductor Materials Institute
Administrative Organization National Semiconductor Equipment and Materials Standardization Technical Committee; National Semiconductor Equipment and Materials Standardization Technical Committee Materials Branch
Regulation (derived from) National Standards Bulletin 2014 No. 33
Proposing organization National Semiconductor Equipment and Materials Standardization Technical Committee (SAC/TC 203), National Semiconductor Equipment and Materials Standardization Technical Committee Materials Branch (SAC/TC 203/SC 2)
Issuing agency(ies) General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China
Summary This Standard specifies the polysilicon requirements, test methods, inspection rules and signs, packaging, transportation, storage, quality certificates and orders (or contract) content. This Standard applies to chlorine, silane obtained polysilicon.

Standards related to: GB/T 12963-2014

GB/T 12963-2014
GB
NATIONAL STANDARD OF THE
PEOPLE’S REPUBLIC OF CHINA
ICS 29.045
H 82
Replacing GB/T 12963-2009
Electronic-grade Polycrystalline Silicon
ISSUED ON. DECEMBER 31, 2014
IMPLEMENTED ON. SEPTEMBER 1, 2015
Issued by.
General Administration of Quality Supervision, Inspection
and Quarantine of the People’s Republic of China;
Standardization Administration of the People’s Republic of
China.
Table of Contents
Foreword ... 3 
1  Scope ... 4 
2  Normative references ... 4 
3 Terms and definitions ... 5 
4 Requirements ... 5 
5 Testing Method ... 7 
6 Inspection Rules ... 8 
7 Mark, Package, Transportation and Storage ... 9 
8 Content of Order List (or Contract) ... 10 
Foreword
This Standard was drafted in accordance with the rules given in GB/T 1.1-2009.
This Standard replaces GB/T 12963-2009 "Polycrystalline silicon". Compared with GB/T
12963-2009, the main changes of this Standard are as follows.
- Add the reference national standards GB/T 1551, GB/T 1557, GB/T 24574, GB/T
24581 and GB/T 24582 (see Chapter 2);
- Add polycrystalline silicon’s technical parameters, including the requirements of donor
impurity concentration, acceptor impurity concentration, oxygen concentration,
substrate metal impurity concentration, surface metal impurity concentration (see
Table 1);
- For different grade of polycrystalline silicon, the carbon concentration is revised
FROM < 1.5 × 1015 atoms / cm3, < 2 × 1016 atoms/cm3, < 2 × 1016 atoms/cm3 TO < 4.0 ×
1016 atoms/cm3, < 1.0 × 1016 atoms/cm3, < 1.5 × 1016 atoms/cm3 respectively (see
Table 1).
Please note that some of the content of this document may involve patents. The issuing
agency of this document do not undertake the responsibility to identify these patents.
This Standard was jointly proposed by and shall be under the jurisdiction of National
Standardization Technical Committee of Semiconductor Equipment and Materials
(SAC/TC 203) AND National Standardization Technical Committee of Semiconductor
Equipment and Materials – Material Sub-committee (SAC/TC 203/SC 2).
Drafting organizations of this Standard. Emei Semiconductor Materials Research Institute,
Sichuan Xinguang Silicon Technology Co., Ltd., Youyan Semiconductor Materials Co.,
Ltd., Jiangsu Zhongneng Silicon Technology Development Co., Ltd., Xinte Energy Co., Ltd.
AND Luoyang Sino-silicon High-tech Co,. Ltd.
The drafters of this Standard. Zhan Ke, Yang, Zhong Na, Li Yawen, Liang Hong, Sun Yan,
Liu Xiaoxia, Yin Bo, Gan Xinye and Yan Dazhou.
The previous editions replaced by this Standard are as follows.
- GB/T 12963-1991, GB/T 12963-1996, GB/T 12963-2009.
Specification for Polycrystalline Silicon
1 Scope
This Standard specifies polycrystalline silicon’s requirements, test methods,
inspection rules, mark, transportation, storage, quality certificate and order list (or
contract).
This Standard is applicable to the polycrystalline silicon which is manufactured from
chlorosilane and silane.
2 Normative references
The following documents contain provisions which, through reference in this text,
constitute the provisions of this Standard. For dated reference, the subsequent
amendments (excluding corrigendum) or revisions of these publications do not apply.
For undated references, the latest edition of the normative document is applicable to
this Standard.
GB/T 1550 Standard methods for measuring conductivity type of extrinsic
semiconducting materials
GB/T 1551 Test method for measuring resistivity of monocrystal silicon
GB/T 1553 Test methods for minority carrier lifetime in bulk germanium and
silicon by measurement of photoconductivity decay
GB/T 1557 The method of determining interstitial oxygen content in silicon by
infrared absorption
GB/T 1558 Test method for substitutional atomic carbon content of silicon by
infrared absorption
GB/T 4059 Polycrystalline silicon - Examination method - Zone-melting on
phosphorus under controlled atmosphere
GB/T 4060 Polycrystalline silicon - Examination method - Vacuum zone-melting
on boron
GB/T 4061 Polycrystalline silicon - Examination method - Assessment of
sandwiches on cross-section by chemical corrosion
GB/T 13389 Practice for conversion between resistivity and dopant density for
determined by the negotiation of the supplier and purchaser.
6.5 Determination of inspection result
6.5.1 The grade of polycrystalline silicon shall be determined by donor impurity
concentration, acceptor impurity concentration, carbon concentration, oxygen
concentration, surface metal impurity concentration and substrate metal impurity
concentration. If one item of the inspection results is unqualified, then the doubling
sampling is required to be carried out for the re-inspection of the unqualified item(s). If
it is still unqualified, then this batch of products are deemed as unqualified.
6.5.2 The determination of inspection result of conduction type, minority carrier
lifetime, resistivity, dimension and allowable deviation, structure and appearance
quality shall be determined by negotiation of the supplier and purchaser.
7 Mark, Package, Transportation and Storage
7.1 Mark
The wordings or marks such as "Handle with Care", "Keep Away From Corrosion,
Keep Away from Moisture" shall be marked on the packing box, and indicate.
a) Purchaser’s name;
b) Product name, designation;
c) Number of packages and net weight of the product;
d) Supplier’s name.
7.2 Packaging
The polycrystalline silicon shall be packed into a clean polyethylene packaging bag
after it is cleaned and dried in a certain way; then the packaging bag shall be packed
into a packing box. It is required to protect the polyethylene packaging bag from
breakage while packing, so as to avoid the foreign contamination to the product; the
good protection shall be provided in an optimal placing way. The packing of
polycrystalline silicon can also be negotiated by the supplier and purchaser.
7.3 Transport
The product shall be loaded and unloaded carefully during the transport process; do
not press and shove it, and adopt the vibration-proof measures.
7.4 Storage
The product shall be stored in a clean and dry environment.
7.5 Quality certificate
Each batch of product shall be accompanied by a quality certificate, and noted with.
a) Supplier’s name;
b) Product name and designation;
c) Product batch number;
d) The gross weight and net weight of product;
e) Stamps of each-item inspection result and inspection department;
f) Serial number of this Standard;
g) Date of exit-factory.
8 Content of Order List (or Contract)
The following contents shall be included in the order list of specified products in this
Standard.
a) Product name and designation;
b) Serial number of this Standard;
c) The content negotiated by the supplier and purchaser in this Standard;
d) Other.
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