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GB/T 11446.1-2013 (GBT11446.1-2013)

GB/T 11446.1-2013_English: PDF (GBT 11446.1-2013, GBT11446.1-2013)
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BASIC DATA
Standard ID GB/T 11446.1-2013 (GB/T11446.1-2013)
Description (Translated English) Electronic grade water
Sector / Industry National Standard (Recommended)
Classification of Chinese Standard L90
Classification of International Standard 31.030
Word Count Estimation 9,930
Older Standard (superseded by this standard) GB/T 11446.1-1997
Quoted Standard GB/T 11446.3-2013; GB/T 11446.4-2013; GB/T 11446.5-2013; GB/T 11446.6-2013; GB/T 11446.7-2013; GB/T 11446.8-2013; GB/T 11446.9-2013; GB/T 11446.10-2013
Drafting Organization MII materials for Quality Supervision and Inspection Center
Administrative Organization China Electronics Standardization Institute
Regulation (derived from) National Standards Bulletin 2013 No. 27
Proposing organization Ministry of Industry and Information Technology of the People's Republic of China
Issuing agency(ies) General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China
Summary This standard specifies the level of electronic-grade water, technical requirements, test methods and inspection rules. This standard applies to the electronics and semiconductor industries with high-purity water for cleaning.

Standards related to: GB/T 11446.1-2013

GB/T 11446.1-2013
GB
NATIONAL STANDARD OF THE
PEOPLE’S REPUBLIC OF CHINA
ICS 31-030
L 90
Replacing GB/T 11446.1-1997
Electronic grade water
ISSUED ON: DECEMBER 31, 2013
IMPLEMENTED ON: AUGUST 15, 2014
Issued by: General Administration of Quality Supervision, Inspection and
Quarantine of PRC;
Standardization Administration of PRC.
Table of Contents
Foreword ... 3 
1 Scope ... 5 
2 Normative references ... 5 
3 Terms and definitions ... 5 
4 Classification and marking ... 10 
5 Requirements ... 10 
6 Test method ... 11 
7 Inspection rules ... 12 
8 Sampling, storage, transportation, marking ... 13 
Electronic grade water
1 Scope
This part of GB/T 11446 specifies the grade, technical index requirements, test
methods, inspection rules of electronic grade water.
This part applies to high-purity cleaning water, which is used in the electronics
and semiconductor industries.
2 Normative references
The following documents are essential to the application of this document. For
the dated documents, only the versions with the dates indicated are applicable
to this document; for the undated documents, only the latest version (including
all the amendments) is applicable to this standard.
GB/T 11446.3-2013 Generic rules for test methods of electronic grade water
GB/T 11446.4-2013 Test method for resistivity of electronic grade water
GB/T 11446.5-2013 Test method for measuring trace metals in electronic
grade water by atomic absorption spectrophotometry
GB/T 11446.6-2013 Test method for SiO2 in electronic grade water by
spectrophotometer
GB/T 11446.7-2013 Test method for trace anion in electronic grade water by
ion chromatography
GB/T 11446.8-2013 Test method for total organic carbon in electronic grade
water
GB/T 11446.9-2013 Test method for particles in electronic grade water by
instrument
GB/T 11446.10-2013 Test method for total bacterial count in electronic grade
water by membrane filters
3 Terms and definitions
The following terms and definitions apply to this document.
Deionized water
After ion exchange treatment, high-purity water whose impurities in the form
of ions are removed.
3.15
Regeneration
Part of the operating cycle of the ion exchange process. In this part, a certain
amount of chemical reagent is used, to restore the exchange capacity,
through the ion exchange resin.
3.16
Complex bed
The cation exchange resin and anion exchange resin are respectively
loaded into two ion exchange columns; the two columns are connected in
series; the water is purified by passing through the two columns in sequence.
3.17
Mixed bed
The cation exchange resin and anion exchange resin are mixed uniformly
AND packed in the same ion exchange column; the purification effect is
equivalent to the use of many complex beds in series.
3.18
Electrodialysis
A method of separating ions in water. In the electrodialysis device, the anode
and cathode are separated into a series of small chambers, by the
alternately arranged anion and cation exchange membranes. When the
water flows through the small chamber, under the action of the direct current
electric field, the cations in the water move toward the cathode, BUT they
cannot pass through the cation membrane; the anions are the opposite. In
this way, a concentrated and fresh water chamber are existed between
phases, to achieve the purpose of purifying water.
3.19
Reverse osmosis
A semi-permeable membrane is used to separate the concentrated water
and fresh water, AND a stronger mechanical pressure than the osmotic
pressure is applied on the concentrated water. Therefore, most of the water
in the concentrated water will pass through the semi-permeable membrane,
whilst the impurities will remain in it, to achieve the purpose of separation
and purification.
3.20
Reverse osmosis membrane
A synthetic membrane, which is used to prepare pure water, by reverse
osmosis. Its pore size is generally 0.02 μm or less. It can be used to remove
inorganic ions, organic matter, bacteria, etc., to purify water.
3.21
Membrane filter
A film, which has an average pore size (diameter) greater than 0.01 μm, AND
can trap particles larger than the average pore size on or near its surface.
3.22
Ultrafiltration
A filtration method, in which water flows through an ultrafiltration membrane,
under a certain pressure, to remove extremely fine particles, colloids,
bacteria in the water.
3.23
Terminal
The outlet or use location of the water, after each purification process, in the
high-purity water production process.
3.24
Sterile
The state of not containing any living organisms (whether active or dormant).
3.25
pH
The negative logarithm of the activity of hydrogen ions OR the negative
logarithm of the reciprocal of the activity of hydroxide ions, in an aqueous
solution.
GB/T 11446.9-2013.
6.4 Total number of bacteria
The total number of bacteria in electronic grade water is measured, according
to GB/T 11446.10-2013.
6.5 Trace metal content
The content of trace metals in electronic grade water is measured, according to
GB/T 11446.5-2013.
6.6 The content of fluoride ion, chloride ion, nitrite ion, bromide ion,
nitrate ion, phosphate ion, sulfate ion
The content of fluoride ion, chloride ion, nitrite ion, bromide ion, nitrate ion,
phosphate ion, sulfate ion in electronic grade water is measured, according to
GB/T 11446.7-2013.
6.7 Total organic carbon content
The total organic carbon content in electronic grade water is measured,
according to GB/T 11446.8-2013.
7 Inspection rules
7.1 Inspection department
The inspection of electronic grade water shall be carried out, in a qualified
inspection department.
7.2 Inspection classification
Electronic grade water's inspection is divided into delivery inspection and
routine inspection.
7.3 Delivery inspection
7.3.1 Sampling inspection items
Electronic grade water's resistivity, sodium ion, total silicon (calculated as
silicon dioxide) are the delivery inspection items.
7.3.2 Qualification criteria
In the sampling of the water terminal, if one or more of the inspection results
are unqualified after the inspection, sampling shall be carried out again for
inspection. If it is still unqualified, this batch is unqualified AND it shall propose
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