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GB/T 11446.1-2013 PDF English

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GB/T 11446.1-2013: Electronic grade water
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GB/T 11446.1: Evolution and historical versions

Standard IDContents [version]USDSTEP2[PDF] deliveryName of Chinese StandardStatus
GB/T 11446.1-2013English170 Add to Cart 0-9 seconds. Auto-delivery Electronic grade water Valid
GB/T 11446.1-1997English279 Add to Cart 3 days Electronic grade water Obsolete
GB 11446.1-1989English199 Add to Cart 2 days Electronic grade water Obsolete

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GB/T 11446.1-2013: Electronic grade water

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GB NATIONAL STANDARD OF THE PEOPLE’S REPUBLIC OF CHINA ICS 31-030 L 90 Replacing GB/T 11446.1-1997 Electronic grade water Issued on. DECEMBER 31, 2013 Implemented on. AUGUST 15, 2014 Issued by. General Administration of Quality Supervision, Inspection and Quarantine of PRC; Standardization Administration of PRC.

Table of Contents

Foreword... 3 1 Scope... 5 2 Normative references... 5 3 Terms and definitions... 5 4 Classification and marking... 10 5 Requirements... 10 6 Test method... 11 7 Inspection rules... 12 8 Sampling, storage, transportation, marking... 13

Foreword

The expected structure of GB/T 11446 is as follows. - GB/T 11446.1 Electronic grade water; - GB/T 11446.2 (To be determined); - GB/T 11446.3 Generic rules for test methods of electronic grade water; - GB/T 11446.4 Test method for resistivity of electronic grade water; - GB/T 11446.5 Test method for measuring trace metals in electronic grade water by atomic absorption spectrophotometry; - GB/T 11446.6 Test method for SiO2 in electronic grade water by spectrophotometer; - GB/T 11446.7 Test method for trace anion in electronic grade water by ion chromatography; - GB/T 11446.8 Test method for total organic carbon in electronic grade water; - GB/T 11446.9 Test method for particles in electronic grade water by instrument; - GB/T 11446.10 Test method for total bacterial count in electronic grade water by membrane filters. This part is Part 1 of GB/T 11446. This part was drafted in accordance with the rules given in GB/T 1.1-2009. This part replaces GB/T 11446.1-1997 "Electronic grade water". Compared with GB/T 11446.1-1997, this part mainly contains the following changes. - In "3 Terms and definitions", ADD the definitions of "ion exchange resin", "sterile", "pH" (see Chapter 3); - MODIFY the resistivity indexes of "EW-II", "EW-III", "EW-IV" grade water in "5 Requirements" (see Chapter 5); - MODIFY the particle count indicators of the "EW-I", "EW-II", "EW-III", "EW- IV" grade water in the "5 Requirements" (see Chapter 5); - In "5 Requirements", ADD the requirements and indicators of "iron" and "lead" metal ions and "fluorine", "nitrite" and "bromide" anions (see Chapter 5); - In "6 Test method", ADD the testing methods of "iron", "lead", "fluoride ion", "nitrite ion", "bromide ion" (see Chapter 6). This part was proposed by the Ministry of Industry and Information Technology of the People's Republic of China. This part shall be under the jurisdiction of China Electronics Standardization Institute. Drafting organizations of this part. Special Material Quality Supervision and Inspection Center of the Ministry of Information Industry, the Institute of Semiconductors of the Chinese Academy of Sciences, the China Electronics Standardization Institute, the 46th Research Institute of China Electronics Technology Group Corporation. The main drafters of this part. Chu Lianqing, Wang Yi, He Xiukun, Duan Shuguang, Ti Liu Wang, Liu Yun. This standard replaces the standard previously issued as follows. - GB/T 11446.1-1989, GB/T 11446.1-1997. Electronic grade water

1 Scope

This part of GB/T 11446 specifies the grade, technical index requirements, test methods, inspection rules of electronic grade water. This part applies to high-purity cleaning water, which is used in the electronics and semiconductor industries.

2 Normative references

The following documents are essential to the application of this document. For the dated documents, only the versions with the dates indicated are applicable to this document; for the undated documents, only the latest version (including all the amendments) is applicable to this standard. GB/T 11446.3-2013 Generic rules for test methods of electronic grade water GB/T 11446.4-2013 Test method for resistivity of electronic grade water GB/T 11446.5-2013 Test method for measuring trace metals in electronic grade water by atomic absorption spectrophotometry GB/T 11446.6-2013 Test method for SiO2 in electronic grade water by spectrophotometer GB/T 11446.7-2013 Test method for trace anion in electronic grade water by ion chromatography

3 Terms and definitions

The following terms and definitions apply to this document. 3.1 Electronic grade water High-purity water, which is used in electronic and semiconductor processes. 3.4 Soluble silicon A soluble silicate, which exists in water, as a single molecule. 3.5 Granular matter Except for gas, a substance dispersed in water, in a non-liquid state AND forming a heterogeneous mixture. 3.6 Total organic carbon; TOC The total amount of carbon in the water, in the form of various organic matter. It includes organic matter, which is easily oxidized by general strong oxidizing agents, AND organic matter, which needs to be oxidized by special methods. 3.7 Absorption The phenomenon, that some porous granular substances absorb certain substances, due to surface activity. 3.8 Coagulation After a certain electrolyte is added to the source water, the charged colloidal particles, in the water, are neutralized by the heterogeneous charges in the electrolyte, so that they aggregate into larger particles and settle.

4 Classification and marking

4.1 Classification Electronic grade moisture is divided into four grades. grade I, grade II, grade III, grade IV. 4.2 Marking The grade I electronic grade water is marked as. EW-I.

5 Requirements

The technical indicators of electronic grade water shall meet the requirements of Table 1.

6 Test method

6.1 Resistivity The electrical resistivity of electronic grade water is measured, according to GB/T 11446.4-2013. 6.2 Total silicon content (calculated as silicon dioxide) The content of total silicon (calculated as silicon dioxide) in electronic grade water is measured, according to GB/T 11446.6-2013. 6.3 Number of particles The number of particles in electronic grade water is measured, according to Item Technical indicators Resistivity (25 °C)/M Ω·cm ≥ 18 (Not less than 17 for 5% of time) 6.4 Total number of bacteria The total number of bacteria in electronic grade water is measured, according to GB/T 11446.10-2013. 6.5 Trace metal content The content of trace metals in electronic grade water is measured, according to GB/T 11446.5-2013. 6.7 Total organic carbon content The total organic carbon content in electronic grade water is measured, according to GB/T 11446.8-2013.

7 Inspection rules

7.1 Inspection department The inspection of electronic grade water shall be carried out, in a qualified inspection department. 7.2 Inspection classification Electronic grade water's inspection is divided into delivery inspection and routine inspection. 7.3 Delivery inspection 7.4 Routine inspection (full inspection items) 7.4.1 Inspection items The inspection items are all the items, which are specified in Table 1.The inspection sequence shall be carried out, in the principle that it does not affect the subsequent test results. 7.4.3 Frequency of inspection Routine inspection shall be carried out, at least once a year. Routine inspection shall also be carried out, when water production conditions change.

8 Sampling, storage, transportation, marking

8.1 Sampling, storage, transportation The sampling, storage, transportation of electronic grade water shall comply with the requirements of GB/T 11446.3-2013. 8.2 Marking When the water terminal is sampled for inspection, it shall attach an inspection certificate after the water quality is qualified. The certificate shall contain the following content. ......
Source: Above contents are excerpted from the full-copy PDF -- translated/reviewed by: www.ChineseStandard.net / Wayne Zheng et al.


      

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