GB/T 42659-2023 English PDF

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GB/T 42659-2023: Surface chemical analysis - Scanning probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems
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Basic data

Standard ID: GB/T 42659-2023 (GB/T42659-2023)
Description (Translated English): Surface chemical analysis - Scanning probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: G04
Classification of International Standard: 71.040.40
Word Count Estimation: 54,580
Date of Issue: 2023-08-06
Date of Implementation: 2024-03-01
Issuing agency(ies): State Administration for Market Regulation, China National Standardization Administration

GB/T 42659-2023: Surface chemical analysis - Scanning probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
ICS 71.040.40 CCSG04 National Standards of People's Republic of China Surface chemical analysis scanning probe microscopy Determination of geometric quantities using scanning probe microscopy. Measurement system calibration (ISO 11952.2019,IDT) Published on 2023-08-06 2024-03-01 Implementation State Administration for Market Regulation Released by the National Standardization Administration Committee

Table of contents

Preface III Introduction IV 1 Scope 1 2 Normative reference documents 1 3 Terms and Definitions 1 4 symbol 2 5 Features of SPM 3 5.1 Composition of SPM 3 5.2 Metrology classification of SPM 4 5.3 SPM structural block diagram 5 5.4 Calibration interval 6 6 Preliminary study of measurement system characteristics 6 6.1 General principles of instrument characteristics and influencing factors to be studied 6 6.2 Waiting time after measurement system intervention (such as instrument installation, intrinsic effects, operation execution, preheating, tip sample replacement, etc.) 7 6.3 External influences 8 6.4 Summary 8 7 Calibration of scanning axis 9 7.1 General 9 7.2 Measurement standards 9 7.3 X and y scanning axis deviation (xtz, ytz) of xy scanner 10 7.4 Calibration of x and y axes (Cx, Cy) and verticality (ϕxy) and determination of deviations (xtx, yty, ywx) 12 7.5 Calibration of z-axis Cz, ϕxz, ϕyz and determination of deviations ztz, zwx, zwy 19 7.6 Three-dimensional measurement standards for optional extended calibration 26 8 Reporting of calibration results29 8.1 General 29 8.2 Equipment used30 8.3 Notes on environmental conditions30 8.4 Preliminary study (according to Chapter 6) 30 8.5 Calibration – details of measurement standards, scan range and scan speed (according to Chapter 7) 30 8.6 Additional Statement 30 9 Measurement uncertainty31 9.1 General 31 9.2 Vertical measurements (height and depth) 31 10 Reporting of results (report format) 31 Appendix A (informative) Example of superposition of interference effects in topographic images 33 Appendix B (informative) Sound detection. influence of sound insulation cover 34 Appendix C (informative) Thermal insulation effect of soundproof cover/measuring box 36 Appendix D (Informative) Recording the processing of contaminants in topography images 37 Appendix E (informative) Determination of step height. comparison between histogram method and ISO 5436-1 method 38 Appendix F (normative) Measurement uncertainty of transverse measured objects (spacing, position, diameter) 40 F.1 Lateral measurement 40 F.2 Measurement model for spacing 40 Reference 44

Foreword

This document complies with the provisions of GB/T 1.1-2020 "Standardization Work Guidelines Part 1.Structure and Drafting Rules of Standardization Documents" Drafting. This document is equivalent to ISO 11952.2019 "Surface chemical analysis scanning probe microscopy Determination of geometry using scanning probe microscopy" He Quantity. Measurement System Calibration. Please note that some content in this document may be subject to patents. The publisher of this document assumes no responsibility for identifying patents. This document is proposed and coordinated by the National Microbeam Analysis Standardization Technical Committee (SAC/TC38). This document was drafted by. China Institute of Metrology, Shanghai Institute of Metrology and Testing Technology, and Xi'an Jiaotong University. The main drafters of this document. Li Wei, Cai Xiaoyu, Li Shi, Yang Shuming, Cheng Biyao, Wei Jiasi, Gao Sitian.

Introduction

The progress of miniaturization of semiconductor device structures, accompanied by the rapid development of many different applications of nanotechnology in industrial manufacturing processes, requires Reliable and comparable quantitative size measurements in the micron and sub-micron range [9]. At present, it is often necessary to reach nanoscale or even higher distinguishing measurement capabilities. Traditional optical, stylus measurement methods or coordinate measurement systems cannot achieve this level of resolution. Therefore, scanning probe microscopy (SPM) is increasingly used as a quantitative measurement tool. Its application scope is no longer limited to research development, but covers industrial production and testing. For this type of measuring instrument, a standardized calibration procedure needs to be developed, such as the established calibration procedure for stylus instruments (see GB/T 33523.701-2017). The characteristics of the measurement standards used for effective and reliable calibration of the SPM are recorded in procedural documents and And serve as the basis for calibration (see Figure 1). Also, there are clear calibration steps. Only when the prerequisites in Figure 1 are met can traceable measurements of geometric quantities be carried out. NOTE. The purpose of this document is to calibrate the user's SPM using calibrated traceable measurement standards. Figure 1 Traceability chain of SPM SPM is a measuring device that works in a point-by-point scanning manner. It uses a probe with a sufficiently sharp tip to Interactions (such as quantum tunneling, forces between atoms or molecules, or near-field modes of electromagnetic waves) are used to describe the surface of the measured object. probe and quilt The measured object moves relatively in a specific way [10] in a plane (hereinafter referred to as the xy plane), and at the same time the interaction signal is collected, and the Used to control the distance between the probe and the object being measured. In this document, signal refers specifically to the signal used to determine the topography (hereinafter referred to as "z Signal"). This document covers the necessary inspection of SPM equipment characteristics required for geometric measurement, as well as the calibration of the motion axes (x, y, z). Accurate [11], that is, the traceability of length units is achieved by measuring traceable transverse directions, step heights and three-dimensional measurement standards (see Figure 2). This document is intended for the highest level of axis calibration and is therefore mainly used for high-stability SPMs. General industrial use may require only A slightly lower level of calibration is required. Indexing serial number description. 1 ---Measurement standard sample for inspection; 1a---Flatness; 1b---Probe shape; 2 ---Measurement standards used for calibration; 2a---One-dimensional lateral and two-dimensional lateral; 2b---step height; 3 ---Calibrate the measurement standard using a standard device (certified calibration, measurement value and uncertainty). Figure 2 Verification of calibrated SPM using test samples and standards Surface chemical analysis scanning probe microscopy Determination of geometric quantities using scanning probe microscopy. Measurement system calibration

1 Scope

This document describes methods for the characterization and calibration of the scanning axes of scanning probe microscopes (SPM) for the measurement of the highest level geometric quantities, applicable It is used to provide further calibrated measurement systems and is not suitable for general industrial applications with lower calibration level requirements. This document is intended to. --- Improve the comparability of SPM geometric quantity measurement results by tracing the length unit; ---Clear the minimum requirements for calibration procedures and acceptance conditions; --- Confirm the ability of the instrument being calibrated (give the instrument the category of "calibration capability"); --- Specify the scope of calibration (measurement and environmental conditions, measurement range, time stability, versatility); ---According to ISO /IEC Guide98-3, provide a model to calculate the uncertainty of simple geometric quantities in SPM measurements; ---Specifies requirements for reporting results.

2 Normative reference documents

The contents of the following documents constitute essential provisions of this document through normative references in the text. Among them, the dated quotations For undated referenced documents, only the version corresponding to that date applies to this document; for undated referenced documents, the latest version (including all amendments) applies to this document. ISO 18115-2 Glossary of surface chemical analysis Part 2.Scanning probe microscopy terminology (Surfacechemical Note. GB/T 22461.2-2023 Surface chemical analysis vocabulary Part 2.Scanning probe microscopy terminology (ISO 18115-2.2021, MOD) ISO /IEC Guide98-3 Measurement Uncertainty Part 3.Guidelines for the Expression of Measurement Uncertainty (GUM.1995) (GUM.1995)] Note. GB/T 27418-2017 Measurement uncertainty evaluation and expression (ISO /IEC Guide98-3.2008, MOD) IEC /T S62622 Description, measurement and dimensional quality parameters of nanotechnology artificial gratings (Nanotechnologies-

3 Terms and definitions

The following terms and definitions as defined in ISO 18115-2 and IEC /T S62622 apply to this document. 3.1 scanner distortionscannerbow When the scanner is displaced in the xy direction, the additional offset is caused in the z direction. Note. Scanner distortion is also known as "out-of-plane coupled motion" (see xtz and ytz in Chapter 4). ......

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