GB/T 42721-2023 English PDF

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GB/T 42721-2023: Electronic specialty gas - Nitric oxide
Status: Valid

Standard ID	USD	BUY PDF	Lead-Days	Standard Title (Description)	Status
GB/T 42721-2023	269	Add to Cart	3 days	Electronic specialty gas - Nitric oxide	Valid

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Basic data

Standard ID: GB/T 42721-2023 (GB/T42721-2023)
Description (Translated English): Electronic specialty gas - Nitric oxide
Sector / Industry: National Standard (Recommended)
Classification of Chinese Standard: G86
Classification of International Standard: 71.100.20
Word Count Estimation: 14,183
Date of Issue: 2023-08-06
Date of Implementation: 2024-03-01
Issuing agency(ies): State Administration for Market Regulation, China National Standardization Administration

GB/T 42721-2023: Electronic specialty gas - Nitric oxide

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
ICS 71.100.20 CCSG86 National Standards of People's Republic of China Electronic special gas nitric oxide Published on 2023-08-06 2024-03-01 Implementation State Administration for Market Regulation Released by the National Standardization Administration Committee

Foreword

This document complies with the provisions of GB/T 1.1-2020 "Standardization Work Guidelines Part 1.Structure and Drafting Rules of Standardization Documents" Drafting. Please note that some content in this document may be subject to patents. The publisher of this document assumes no responsibility for identifying patents. This document is proposed and coordinated by the National Semiconductor Equipment and Materials Standardization Technical Committee (SAC/TC203). This document was drafted by. Dalian Kelide Optoelectronic Materials Co., Ltd., Haohua Gas Co., Ltd., Baitong Standardization, Nanxun District, Huzhou City Research Institute, CSSC (Handan) Perry Special Gas Co., Ltd., Guangdong Huate Gas Co., Ltd., Suzhou Jinhong Gas Co., Ltd. Company, Jiangxi Huate Electronic Chemicals Co., Ltd., CTI Testing and Certification Group Co., Ltd., Luling Electronic Materials (Tianjin) Co., Ltd., Beijing Gomax Instrument Technology Co., Ltd., China Three Gorges University, Hubei Heyuan Gas Co., Ltd., Hubei Beijing Rui Gas Co., Ltd., Lanzhou Yu Long Gas Co., Ltd., Yumen Dayang Tianqing Petrochemical Co., Ltd., Haohua Gas Co., Ltd. Southwest Branch, Zhonghao Guangming Chemical Industry Research and Design Institute Co., Ltd., Shanghai Shennan Special Gas Co., Ltd., Shanghai Huaai Chromatography Analysis Technology Co., Ltd., Dalian Date Gas Co., Ltd. Co., Ltd., Shanghai Institute of Metrology and Testing Technology, China Institute of Metrology, Hangzhou New Century Mixed Gas Co., Ltd., Suzhou Yvit New Materials Co., Ltd., Lianxiong Investment (Shanghai) Co., Ltd., Hangyang Group Co., Ltd., Quzhou Hangyang Special Gas Co., Ltd., Shanghai Fanwei Instrument Equipment Co., Ltd., Zhejiang Hongxin Semiconductor Co., Ltd., Bruker (Beijing) Technology Co., Ltd., Air Chemical Products (China) Investment Co., Ltd., Zhejiang Juhe Technology Co., Ltd., Shaoxing Keyi Standard Technology Consulting Co., Ltd., Shenyang Zhongfu Kejin Pressure Vessel Co., Ltd. Company, Zhejiang Seat Electronic Materials Co., Ltd., Zhejiang Dongkai Semiconductor Technology Co., Ltd., Heli Gas (Shanghai) Co., Ltd., Kunming Guangzhou Ruida Special Gas Co., Ltd., Southwest Chemical Research and Design Institute Co., Ltd. The main drafters of this document. Shi Yini, Fu Mengyue, Chen Hui, Liu Ying, Jiao Peipei, Guo Qiong, Zhang Tianze, Li Xiangyu, Yuan Ruiling, Shao Zhiping, Fu Zhuhong, Chen Yanshan, Jin Xianghua, Sun Meng, Liao Hengyi, Ru Gaoyi, Cao Xuefeng, Tang Ping, Niu Yandong, Li Changjian, Ma Binqi, Du Dayan, Cao Xiaolin, Fang Qiang, Yuan Youlu, Wang Xiaobo, Yin Aihua, Chang Xia, Bian Luning, Yang Hui, Wang Zhenghong, Chen Jie, Wu Liang, Fang Hua, Wang Zhaobin, Yu Qingwei, Gao Yanqiu, Hao Ping, Wang Defa, Zhang Tiqiang, Zhang Jinbo, Yang Jinshan, Qin Yuanwang, He Bo, Yang Kang, Huang Hui, Han Yisong, Mao Lingling, Wu Huiming, Lan Feng, Shang Baiyang, Geng Chaoxi, Wang Jing, Li Qian, Dong Shuo, Gu Dazheng, Gong Bing, Wang Dawei, Yang Li, Qian Yechao, Wu Qiankang, Liang Yongqiang, Liang Chengke, Gao Jing, Ma Changning, Zhao Gang, Lai Xiaofeng, Zhou Pengyun. Electronic special gas nitric oxide

1 Scope

This document specifies the technical requirements, sampling, test methods, inspection rules, marking, packaging, transportation, storage and safety information of nitric oxide requirements. This document applies to electronic nitric oxide used in the manufacturing of integrated circuits and other electronic industries.

2 Normative reference documents

The contents of the following documents constitute essential provisions of this document through normative references in the text. Among them, the dated quotations For undated referenced documents, only the version corresponding to that date applies to this document; for undated referenced documents, the latest version (including all amendments) applies to this document. GB 190 Dangerous goods packaging markings GB/T 5099 (all parts) Steel seamless gas cylinders GB/T 5832.3 Determination of trace moisture in gases Part 3.Cavity ring-down spectroscopy GB/T 7144 Gas cylinder color marking GB/T 8979 Pure nitrogen, high-purity nitrogen and ultra-pure nitrogen GB/T 11640 Aluminum alloy seamless gas cylinder GB/T 14194 Compressed gas cylinder filling regulations GB 15258 Regulations on Preparing Chemical Safety Labels GB/T 16804 Gas cylinder warning label GB/T 28726 Gas analysis helium ionization gas chromatography TSGR0005 Safety Technical Supervision Regulations for Mobile Pressure Vessels TSG23 Gas Cylinder Safety Technical Regulations ISO 19230 Gasanalysis-Samplingguidelines

3 Terms and definitions

There are no terms or definitions to be defined in this document.

4 Technical requirements

The technical requirements for nitric oxide should comply with the provisions of Table 1. Table 1 Technical requirements Project indicators Nitric oxide (NO) purity (mole fraction)/10-2 ≥99.9 (Oxygen Argon)(O2 Ar) content (mole fraction)/10-6 < 5 Nitrogen (N2) content (mole fraction)/10-6 < 500 ......

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